Validation of Process to Increase Life of Semiconductor Equipment & Improve Process Yields Through Surface Conditioning
延长半导体设备寿命的工艺验证
基本信息
- 批准号:10075794
- 负责人:
- 金额:$ 6.36万
- 依托单位:
- 依托单位国家:英国
- 项目类别:Grant for R&D
- 财政年份:2023
- 资助国家:英国
- 起止时间:2023 至 无数据
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
Electronic devices are found everywhere today, from the lasers enabling fibre-optic internet connections to your home, to the mobile phone in your pocket, and battery-powered electric vehicles. However, there exists a, "Semiconductor Paradox," that is the environmental cost of the production of semiconductor products that enable energy-saving technologies such as electric vehicles. MOCVD is a process used throughout the semiconductor industry for manufacturing a wide range of products including LED's, power transistors, and microprocessors. MOCVD reactor components (susceptors) consisting of carbon ceramics, have to be cleaned after each campaign to prevent cross-contamination between campaigns. The incumbent method is a high temperature bake in a furnace, at about 1200 °C, for at least 20 hours, in a reducing atmosphere. This is costly, both financially and environmentally, in terms of energy consumption and CO2 emissions. Aesin has developed a new surface reconditioning technique, which reduces equivalent CO2 emissions by 85% and offers increased manufacturing agility to semiconductor manufacturers. It has been proven on some nitride, arsenide, and phosphide materials as the semiconductor industry transitions away from silicon and towards compound semiconductor devices.The aim of this project is to extend the capabilities of the process to other technologically relevant materials and susceptor types and, furthermore, to provide verification of the effectiveness of the process to internationally recognised standards.
如今,电子设备随处可见,从使光纤互联网连接到您家中的激光器,到口袋中的移动的电话,以及电池供电的电动汽车。但是,在电动汽车等节能技术中,存在着半导体产品的生产环境成本“半导体成本”。MOCVD是整个半导体行业用于制造包括LED、功率晶体管和微处理器在内的各种产品的工艺。由碳陶瓷组成的MOCVD反应器组件(蒸发器)必须在每次活动后进行清洁,以防止活动之间的交叉污染。现有方法是在还原气氛中在炉中在约1200 °C下高温烘烤至少20小时。就能源消耗和二氧化碳排放而言,这在财政和环境方面都是昂贵的。Aesin开发了一种新的表面修复技术,可将等效二氧化碳排放量减少85%,并为半导体制造商提供更高的制造灵活性。随着半导体工业从硅向化合物半导体器件的过渡,该工艺已在一些氮化物、砷化物和磷化物材料上得到验证。该项目的目的是将该工艺的能力扩展到其他技术相关的材料和基座类型,并进一步根据国际公认的标准验证该工艺的有效性。
项目成果
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其他文献
吉治仁志 他: "トランスジェニックマウスによるTIMP-1の線維化促進機序"最新医学. 55. 1781-1787 (2000)
Hitoshi Yoshiji 等:“转基因小鼠中 TIMP-1 的促纤维化机制”现代医学 55. 1781-1787 (2000)。
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LiDAR Implementations for Autonomous Vehicle Applications
- DOI:
- 发表时间:
2021 - 期刊:
- 影响因子:0
- 作者:
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吉治仁志 他: "イラスト医学&サイエンスシリーズ血管の分子医学"羊土社(渋谷正史編). 125 (2000)
Hitoshi Yoshiji 等人:“血管医学与科学系列分子医学图解”Yodosha(涉谷正志编辑)125(2000)。
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Effect of manidipine hydrochloride,a calcium antagonist,on isoproterenol-induced left ventricular hypertrophy: "Yoshiyama,M.,Takeuchi,K.,Kim,S.,Hanatani,A.,Omura,T.,Toda,I.,Akioka,K.,Teragaki,M.,Iwao,H.and Yoshikawa,J." Jpn Circ J. 62(1). 47-52 (1998)
钙拮抗剂盐酸马尼地平对异丙肾上腺素引起的左心室肥厚的影响:“Yoshiyama,M.,Takeuchi,K.,Kim,S.,Hanatani,A.,Omura,T.,Toda,I.,Akioka,
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