Advanced manufacturable sputtering of high performance pyroelectric thin films

高性能热释电薄膜的先进可制造溅射

• 批准号: 103525
• 金额: $ 94.24万
• 依托单位: PYREOS LIMITED
• 依托单位国家: 英国
• 项目类别: Collaborative R&D
• 财政年份: 2017
• 资助国家: 英国
• 起止时间: 2017 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=103525
• 关键词: Advanced; manufacturable; sputtering; performance; pyroelectric

The project is a collaboration between Pyreos Ltd, an Edinburgh-based SME who is a world leader in developing thin film pyroelectric infrared sensors, Korvus Technology an Oxford-based SME who manufactures highly customizable advanced modular sputtering (PVD) equipment and Imperial College, with world leading expertise in thin film deposition control, characterization and analysis as well as pyroelectric and ferroelectric oxides. The purpose of the project is to advance the state-of-the-art of depositing thin film pyroelectric oxides as well as piezoelectric and ferroelectric oxides generally, in order to obtain thin films with enhanced performance characteristics as well as substantially improved uniformity, repeatability and stability for volume manufacturing compared to what is available today. By developing and adding new process control and monitoring capabilities to a prototype sputter tool first and a production tool later, will enable the growth of thin film oxides for pyroeletric and other ferroelectric applications to be better understood. As a result, it is expected that the factors affecting the deposition can be controlled in order to produce pyroelectric thin films with significantly improved repeatability and uniformity for higher volumer manufacturing. Further, enhancements to the fundamental peformance chracteristics of the pyroelectric/ferroelectric film will be explored and developed based on altering the microstructure and composition of the films. This project is vital for maintaining a strong UK presence in the growing area of MEMS sensors for a high tech based economy.

该项目由总部位于爱丁堡的中小型企业开发薄膜热释电红外传感器的世界领先企业Pyreos Ltd、生产高度定制化先进模块溅射(PVD)设备的牛津中小型企业Korvus Technology以及在薄膜沉积控制、表征和分析以及热释电和铁电氧化物方面拥有世界领先专业知识的帝国理工学院合作完成。该项目的目的是提高薄膜热释电氧化物以及压电性和铁电性氧化物的沉积技术水平，以便获得与目前可用的薄膜相比，具有更好的性能特性以及显著改善批量生产的均匀性、重复性和稳定性的薄膜。通过首先为原型溅射工具开发和添加新的过程控制和监控功能，然后再开发生产工具，将使人们能够更好地了解用于热释电和其他铁电应用的薄膜氧化物的生长。因此，可望控制影响沉积的因素，以便为更大体积的制造提供具有显著改善的重复性和均匀性的热释电薄膜。此外，还将在改变热释电/铁电薄膜的微观结构和成分的基础上，探索和开发提高热释电/铁电薄膜基本性能的方法。该项目对于保持英国在以高科技为基础的经济中不断增长的MEMS传感器领域的强大存在至关重要。