Novel microwave plasma sputter deposition process providing enhanced optical coatings NMPLAS

新型微波等离子体溅射沉积工艺提供增强的光学涂层 NMPLAS

• 批准号: 104007
• 金额: $ 49.32万
• 依托单位: HELIA PHOTONICS LIMITED
• 依托单位国家: 英国
• 项目类别: Collaborative R&D
• 财政年份: 2018
• 资助国家: 英国
• 起止时间: 2018 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=104007
• 关键词: Novel; microwave; plasma; sputter; deposition

The NMPAS project is focused on an innovation in the Materials & Advanced Manufacturing high growth sector, applying a cutting edge & innovative coating process - Microwave Plasma Assisted Sputtering (MPAS). This offers a room temperature process with up to 6-fold increase in optical coating production throughput compared to current predominantly used high temperature electron-beam deposition production processes. Moreover, MPAS enables use of an expanded range of thermally sensitive/strategic substrates, providing cost and optical coating peformance benefits. Optical coatings are predominant among high value manufacturing sectors & this project opens up new sustainable business for the partners by increasing both the UK’s & China’s competitiveness in lucrative current & emerging high margin global markets. MPAS technology transfer from Univerity of the West of Scotland (UWS) to the project’s industrial partners will enable a step-change in capability for the SMEs. With circa 90% of the worlds optical coatings produced in China, exciting new opportunities for future growth in both capital equipment and coated component sales into the Chinese market. This business-led project brings together three industrial partners from the optical coating sector, UK SMEs Helia Photonics Limited (HPL) & Orion Photonics Ltd (OPL) & Shanghai-based Jason Vacuum Co.,Ltd (SJV), with UK academic partner UWS, pioneer of the MPAS process. The project advances the Technology Readiness Level (TRL) of MPAS to a late stage pre-commercial level, i.e. >TRL6.

NMPAS项目专注于材料和先进制造业高增长领域的创新，应用尖端和创新的涂层工艺-微波等离子体辅助溅射（MPAS）。与目前主要使用的高温电子束沉积生产工艺相比，这提供了一种室温工艺，其光学涂层生产产量增加了6倍。此外，MPAS还可以使用范围更广的热敏/战略基材，提供成本和光学涂层性能优势。光学镀膜在高价值制造业中占主导地位，该项目通过提高英国和中国在利润丰厚的当前和新兴高利润全球市场的竞争力，为合作伙伴开辟了新的可持续业务。MPAS技术从西苏格兰大学（UWS）转移到该项目的工业合作伙伴将使中小企业的能力发生重大变化。全球约90%的光学涂层在中国生产，这为资本设备和涂层组件在中国市场的未来增长带来了令人兴奋的新机遇。这个以商业为主导的项目汇集了来自光学镀膜领域的三个工业合作伙伴，英国中小企业Helia Photonics Limited（HPL）和Orion Photonics Ltd（OPL）以及上海Jason Vacuum Co.，有限公司（SJV），与英国学术合作伙伴UWS，MPAS过程的先驱。该项目将MPAS的技术准备水平（TRL）提高到后期商业前水平，即> TRL 6。