Advanced capabilities for surface engineering and nanolithography

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Advanced capabilities for surface engineering and nanolithography: This project will establish a facility for atomic layer deposition and nanolithography. Strong fabrication and engineering capabilities are key in keeping interdisciplinary research highly competitive. The applications of these cutting-edge surface nanoengineering technologies are enormous and include: development of new materials with new properties for sensing, biosensing, optical, photonic, electronic and medical devices, new metamaterials, solar cell, energy production and environmental protection.