Strategic Equipment - a Dual Beam FIB/SEM with large area patterning, EBSD and nanoprobe capabilities

战略设备 - 具有大面积图案化、EBSD 和纳米探针功能的双束 FIB/SEM

• 批准号: EP/N010868/1
• 负责人: Jason Smith
• 金额: $ 1.63万
• 依托单位: University of Oxford
• 依托单位国家: 英国
• 项目类别: Research Grant
• 财政年份: 2016
• 资助国家: 英国
• 起止时间: 2016 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=EP%2FN010868%2F1
• 关键词: Strategic; Equipment; Dual; Beam; FIB

The FIB/SEM instrument proposed combines various components to provide a powerful tool for a range of advanced nanoscale science. An accelerated ion beam focused to a spot size as small as 5 nanometres can be used to mill and slice materials with extreme precision, while an electron beam and various detectors provide means for nanoscale imaging and characterisation of the surfaces produced. A nanomanipulator probe allows samples to be rotated in-situ and for nanoscale slices of material to be lifted out for further study or use in devices. We will use this instrument in two main ways: 1) Fabrication of micro-optical components In Oxford we have in the past six years pioneered the use of focused ion beams to fabricate surfaces on materials such as fused silica or silicon with nanometre precision and sub-nanometre roughness. This allows us to create devices in which light is stored and manipulated with ultra-low scattering losses, and in which the interaction between light and matter is controlled with exquisite accuracy. We have already had considerable success with this technique on a small scale but are limited in the size of features we can produce. In this new instrument the sample can be moved with extremely high accuracy allowing larger surfaces to be patterned and enabling more complex and extended optical devices that reveal new physics and can be used as key components in a range of technologies. Photonics underpins a diverse range of industry in the UK and we anticipate that our work will lead to innovations in advanced information technologies and sensor systems for defence, healthcare and environmental monitoring, as well as the new field of Quantum Technologies in which the government is currently investing significant resources.2) Characterisation of MaterialsOxford Materials department has long been a world-leading centre for materials characterisation, with particular contributions in electron microscopy and the microstructure of metals. It maintains a wide range of state-of-the-art instruments that are used both as high end scientific tools and as platforms for developing new techniques in microanalysis. This instrument will be used in both ways. It offers leading edge capabilities is 3D characterisation of material defects and impurities at the nanoscale that will enable new techniques aimed at understanding materials with unprecedented detail, and will be applied to solving key problems in the fields of nuclear materials, aerospace alloys, catalysis, and high temperature superconductors. Many of these projects are carried out in collaboration with industry, providing excellent routes towards commercial and societal impact as well as development of new knowledge. In collaboration with a local company (Oxford Instruments) we will try out prototype detector systems to accelerate instrument development and maintain our position at the forefront of this important field. As well as the projects described above, a percentage of time on the instrument will be made available to outside users who will be able to find out about the instrument via our website and annual open days, and apply for instrument time to carry out their own research. The Oxford Materials department has extensive instrument support and user training programmes to ensure that all users can obtain the best from their instrument time. To ensure that the scientific projects pursued are of the highest quality, the use of the instrument and time allocation will be carried out by a steering board of experts who will meet at quarterly intervals.

FIB/SEM仪器结合了各种组件，为一系列先进的纳米科学提供了强大的工具。聚焦到5纳米大小的加速离子束可用于以极高的精度研磨和切片材料，而电子束和各种检测器提供了对所产生的表面进行纳米级成像和表征的手段。纳米操纵器探针允许样品原位旋转，并将材料的纳米级切片取出以供进一步研究或在设备中使用。我们将在两个主要方面使用这种仪器：1）制造微型光学元件在牛津，我们在过去的六年里率先使用聚焦离子束在熔融石英或硅等材料上制造纳米精度和亚纳米粗糙度的表面。这使我们能够创造出一种设备，在这种设备中，光以超低的散射损失被存储和操纵，并且光与物质之间的相互作用以极高的精度被控制。我们已经在小规模上使用这种技术取得了相当大的成功，但我们可以生产的功能大小有限。在这种新仪器中，样品可以以极高的精度移动，允许更大的表面被图案化，并实现更复杂和扩展的光学设备，揭示新的物理学，并可用作一系列技术的关键组件。光子学支撑着英国的各种行业，我们预计我们的工作将导致先进信息技术和传感器系统的创新，用于国防，医疗保健和环境监测，以及量子技术的新领域，政府目前正在投入大量资源。在电子显微镜和金属微观结构方面有特殊贡献。它拥有广泛的最先进的仪器，既可用作高端科学工具，也可用作开发微量分析新技术的平台。这一工具将以两种方式使用。它提供了领先的功能是在纳米级的材料缺陷和杂质的3D表征，这将使新技术能够以前所未有的细节了解材料，并将应用于解决核材料，航空航天合金，催化和高温超导体领域的关键问题。其中许多项目是与工业界合作开展的，为商业和社会影响以及新知识的发展提供了良好的途径。我们将与一家当地公司（牛津仪器）合作，试用原型探测器系统，以加快仪器开发，并保持我们在这一重要领域的领先地位。除了上述项目外，还将向外部用户提供一定比例的仪器时间，他们将能够通过我们的网站和年度开放日了解仪器，并申请仪器时间进行自己的研究。牛津材料部门拥有广泛的仪器支持和用户培训计划，以确保所有用户都能从他们的仪器中获得最佳效果。为确保所开展的科学项目达到最高质量，仪器的使用和时间分配将由一个专家指导委员会负责，该委员会将每季度举行一次会议。

项目成果

Combined modelling and miniaturised characterisation of high-temperature forging in a nickel-based superalloy

• DOI: 10.1016/j.matdes.2018.09.048
• 发表时间: 2018-12-15
• 期刊: MATERIALS & DESIGN
• 影响因子: 8.4
• 作者: Alabort, E.;Reed, R. C.;Barba, D.
• 通讯作者: Barba, D.

Ultrafast miniaturised assessment of high-temperature creep properties of metals

金属高温蠕变性能的超快小型化评估

• DOI: 10.1016/j.matlet.2019.01.011
• 发表时间: 2019
• 期刊: Materials Letters
• 影响因子: 3
• 作者: Barba D

Segregation-assisted creep in nickel-based superalloys : experiments, theory and modelling

镍基高温合金中的偏析辅助蠕变：实验、理论和建模

• 发表时间: 2017
• 作者: Cancho Daniel Barba

High-resolution characterization of the internal and external oxidation of austenitic alloys in supercritical water

• DOI: 10.1016/j.scriptamat.2021.113814
• 发表时间: 2021-05
• 期刊: Scripta Materialia
• 影响因子: 6
• 作者: Kai Chen;Le-fu Zhang;Sheng-chuan Wu;Zhao Shen

A thermodynamically consistent constitutive model for diffusion-assisted plasticity in Ni-based superalloys

• DOI: 10.1016/j.ijplas.2017.12.007
• 发表时间: 2018-06
• 期刊: International Journal of Plasticity
• 影响因子: 9.8
• 作者: D. Barba;E. Alabort;D. Garcia-Gonzalez;J. Moverare;Roger C. Reed;Antoine Jérusalem