AFM-based nano-machining: developing and validating a novel modelling approach for effective process implementation in nanotechnology applications
基于 AFM 的纳米加工:开发和验证一种新颖的建模方法,以在纳米技术应用中有效实施工艺
基本信息
- 批准号:EP/T01489X/1
- 负责人:
- 金额:$ 88.26万
- 依托单位:
- 依托单位国家:英国
- 项目类别:Research Grant
- 财政年份:2020
- 资助国家:英国
- 起止时间:2020 至 无数据
- 项目状态:未结题
- 来源:
- 关键词:
项目摘要
Although photolithography or scanning beam lithography are techniques widely used for the fabrication of devices with nanoscale features, a drive still exists to explore alternative and complementary nanoscale manufacturing processes, particularly for supporting the development of proof-of-concept devices that integrate 3D nano-structures. This is due to the fact that conventional nanofabrication technologies rely on capital-intensive equipment in addition to being restricted in the fabrication of true 3D features and in the range of processable materials. Besides, there are also increased concerns over their environmental friendliness as they are energy and resource intensive and generate significant waste. One candidate nano-manufacturing process that may help address these limitations, particularly during the development stages of nanotechnology-enabled devices, relies on mechanical machining with the tip of an Atomic Force Microscope (AFM) probe. In particular, material removal operations on the nanoscale can be achieved as a result of using the AFM probe tip as a "nano-cutting tool". However, it is currently not possible for AFM practitioners to determine the required input process parameters, in terms of load to be applied by the tip and the cutting direction to be followed, for achieving specific groove dimensions without completing experimental trial-and-error campaigns first. For this reason, this project aims to implement a novel modelling approach of AFM-based nano-machining such that, given a set of input parameters, it will be possible for a user to predict the expected geometry of a machined groove, and vice versa. To achieve this overall aim, the project will develop and validate a new coupled SPH-FE (i.e. Smooth Particle Hydrodynamics - Finite Elements) model of the AFM tip-based nano-machining process. In addition, to ensure that such process modelling is based on reliable data, the project proposes to adopt novel experimental characterisation techniques to extract the mechanical properties of a workpiece material, which are specifically relevant for nanoscale cutting. Finally, the project also aims to demonstrate the increased potential of this nano-manufacturing process, when applied with the proposed modelling approach, for the development and implementation of nanotechnology applications through two lab-based demonstrators.
尽管光刻或扫描光束光刻技术广泛用于制造具有纳米级特征的设备,但探索替代和互补的纳米级制造工艺的动力仍然存在,特别是支持集成3D纳米结构的概念验证设备的开发。这是由于传统的纳米制造技术依赖于资本密集型设备,而且在制造真正的3D特征和可加工材料的范围内受到限制。此外,由于它们是能源和资源密集型的,并且产生大量的废物,人们对它们的环境友好性也越来越关注。一种可能有助于解决这些限制的纳米制造工艺,特别是在纳米技术支持设备的开发阶段,依赖于原子力显微镜(AFM)探针尖端的机械加工。特别是,由于使用AFM探针尖端作为“纳米切削工具”,可以实现纳米尺度上的材料去除操作。然而,AFM从业者目前不可能确定所需的输入工艺参数,就尖端施加的载荷和要遵循的切割方向而言,为了实现特定的凹槽尺寸,而不首先完成实验试错活动。出于这个原因,本项目旨在实现一种基于afm的纳米加工的新型建模方法,这样,给定一组输入参数,用户就可以预测加工槽的预期几何形状,反之亦然。为了实现这一总体目标,该项目将开发和验证一个新的基于AFM尖端的纳米加工过程的耦合SPH-FE(即光滑粒子流体动力学-有限元)模型。此外,为了确保这种过程建模是基于可靠的数据,该项目建议采用新颖的实验表征技术来提取工件材料的机械性能,这与纳米级切割特别相关。最后,该项目还旨在通过两个基于实验室的演示来证明,当与所提出的建模方法一起应用时,这种纳米制造工艺在纳米技术应用的开发和实施方面的潜力增加。
项目成果
期刊论文数量(1)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
Investigation of Nanoscale Scratching on Copper with Conical Tools Using Particle-Based Simulation
- DOI:10.1007/s41871-023-00179-5
- 发表时间:2023-03
- 期刊:
- 影响因子:0
- 作者:Anuj Sharma;S. Kulasegaram;E. Brousseau;K. Esien;Dan Read
- 通讯作者:Anuj Sharma;S. Kulasegaram;E. Brousseau;K. Esien;Dan Read
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Emmanuel Brousseau其他文献
Erratum to: A new process chain for producing bulk metallic glass replication masters with micro- and nano-scale features
- DOI:
10.1007/s00170-016-8409-7 - 发表时间:
2016-01-26 - 期刊:
- 影响因子:3.100
- 作者:
Pierre C. Vella;Stefan S. Dimov;Emmanuel Brousseau;Ben R. Whiteside;Colin A. Grant;Cristina-Luminita Tuinea-Bobe - 通讯作者:
Cristina-Luminita Tuinea-Bobe
A novel smooth particle hydrodynamics framework for modelling melting pool dynamics in laser processing
- DOI:
10.1007/s00366-025-02178-0 - 发表时间:
2025-07-16 - 期刊:
- 影响因子:4.900
- 作者:
Zhihao Zhong;Sivakumar Kulasegaram;Emmanuel Brousseau - 通讯作者:
Emmanuel Brousseau
A full-field non-local crystal plasticity investigation of bi-layered HEA
双层高温合金的全场非局部晶体塑性研究
- DOI:
10.1016/j.ijmecsci.2025.110009 - 发表时间:
2025-02-15 - 期刊:
- 影响因子:9.400
- 作者:
Shuai Zhu;Emmanuel Brousseau - 通讯作者:
Emmanuel Brousseau
An enhanced meshless numerical methodology for modelling pulsed laser ablation of aluminium
一种用于模拟铝脉冲激光烧蚀的增强型无网格数值方法
- DOI:
10.1016/j.jmapro.2024.10.011 - 发表时间:
2024-12-12 - 期刊:
- 影响因子:6.800
- 作者:
Zhihao Zhong;Sivakumar Kulasegaram;Emmanuel Brousseau - 通讯作者:
Emmanuel Brousseau
Emmanuel Brousseau的其他文献
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{{ truncateString('Emmanuel Brousseau', 18)}}的其他基金
Novel Instrumentation for High-Speed AFM-based Nano Machining
用于基于 AFM 的高速纳米加工的新型仪器
- 批准号:
EP/M020703/1 - 财政年份:2015
- 资助金额:
$ 88.26万 - 项目类别:
Research Grant
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