Flexible Optical Lithography for the SuperFab Facility

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SuperFab is a superconducting electronic device nanofabrication facility based at Royal Holloway, University of London. It is dedicated to the fabrication of superconducting quantum devices and participates in the race to develop a superconducting quantum computer. Royal Holloway was the first institution in the UK to fabricate and operate superconducting qubit devices.SuperFab opened in April 2019 following around £10M of investment in world-class electron-beam-lithography, He-ion microscopy and Ne-ion focussed ion beam tools, supported by a wide range of advanced deposition, etching and characterisation tools, all dedicated to the production of sophisticated superconducting quantum devices. The new tool, an advanced direct-write optical lithography tool, will be integrated into our current nanofabrication processes, it will underpin and enhance our superconducting quantum device development, accelerate device production, enhance device quality and support wafer scale device production. The new tool will be available to all users of SuperFab and will provide significant impact within the facility through faster anymore reliable device development and prototyping.