Mid index integrated optical modulators

作为博士项目的一部分，我们设想建立一个厚氮化硅（SiN）平台，用于制造无源器件，如O波段光收发器的多路复用器（MUX/DMUX）、分路器和合路器。氮化硅平台将与有源器件集成，以微米级尺寸和低功耗提供高带宽。这些器件在O波段工作，采用标准CMOS工艺实现，将确保MUX/DMUX具有低温度灵敏度，以及高速和低功耗工作。该项目的目标是开发一种集成方案和工艺流程，以集成O频段中的有源设备和SiN MUX/DMUX，以满足数据中心的未来需求。为了实现项目目标，学生将进行波导和有源器件模拟（光学和电气），并将设计制造掩模和所有结构的工艺流程。这些设备必须在纳米制造中心制造，并在光子学实验室进行表征。这些CMOS兼容材料和器件的集成从未被证明过，并且将代表硅光子学领域的重大成就。学生将在当前的EPSRC项目参考：EP/R 003076/1标题：Rockley Photonics和南安普顿大学：一个繁荣的合作伙伴EPSRC研究主题分类：光电。EPSRC工业行业分类：通信，制造业，电子，信息技术

As part of the PhD project, we have envisioned to build a thick silicon nitride (SiN) platform for the fabrication of passive devices such as multiplexers (MUX/DMUX), splitters and combiners for optical transceivers in the O-band. The silicon nitride platform will be integrated with active devices to deliver high bandwidth with a micrometre scale footprint and low power consumption. Operating in the O-band and realised with standard CMOS processing, these devices will assure a MUX/DMUX with low temperature sensitivity, together with high speed and low power operation. The project aims are to develop an integration scheme and process flow to integrate the active devices and SiN MUX/DMUX in the O band to cover the future requirements of data centres. To achieve the project goals the student will perform waveguide and active device simulations (optical and electrical), and will design fabrication masks and process flows for all the structures. The devices will have to be fabricated in the nanofabrication centre and characterised in the photonics laboratory. The integration of these CMOS compatible materials and devices have never been demonstrated and would represent a significant achievement in the field of silicon photonics. The student will collaborate on the current EPSRC project Reference: EP/R003076/1 Title:Rockley Photonics and the University of Southampton: A Prosperity PartnershipEPSRC Research Topic Classifications: Optoelect. Devices & Circuits EPSRC Industrial Sector Classifications: Communications, Manufacturing, Electronics, Information Technologies