SURFACE SCANNING USING NEAR-FIELD MICROWAVE MICROSCOPY

该项目将雷尼绍在制造和计量方面的世界级专业知识与加的夫高频工程中心结合在一起，使用近场微波显微镜对金属结构进行后期验证。我们将重点介绍使用坐标测量机(CMM)等传统方法难以评估的结构。利用微波探头尖端与样品的电场相互作用，我们将能够(以精确的精度)评估与尖端到表面距离相关的微小电容变化，从而评估表面形貌。预计微波探头可以被整合到雷尼绍的商业坐标测量机中，提供无与伦比的多功能性。

This project combines the world class expertise of Renishaw in manufacturing and metrology with Cardiff's Centre for High Frequency Engineering, using near field microwave microscopy for post machine verification of metal structures. We will focus on structures that would be otherwise difficult to assess using traditional methods such as coordinate measurement machines (CMM). Using the electric field interaction with the sample at the microwave probe tip, we will be able to assess (with exquisite accuracy) small capacitance changes associated with tip-to-surface distance and hence surface morphology. It is expected that the microwave probe could be incorporated into Renishaw's commercial CMMs, to offer unparalleled versatility.