SURFACE SCANNING USING NEAR-FIELD MICROWAVE MICROSCOPY

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This project combines the world class expertise of Renishaw in manufacturing and metrology with Cardiff's Centre for High Frequency Engineering, using near field microwave microscopy for post machine verification of metal structures. We will focus on structures that would be otherwise difficult to assess using traditional methods such as coordinate measurement machines (CMM). Using the electric field interaction with the sample at the microwave probe tip, we will be able to assess (with exquisite accuracy) small capacitance changes associated with tip-to-surface distance and hence surface morphology. It is expected that the microwave probe could be incorporated into Renishaw's commercial CMMs, to offer unparalleled versatility.