Imaging the buried nanostructures beneath the surface using scanning probe microscopy

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Controlling the electric properties of the nanodevice is accomplished to make the nanostructures using nanocomposites or nanoparticles. Thus, the nanoparticles and composits are arrayed on the substrate and/or buried in the surface. However, the size measurement and mapping of individual nanostructures was not accomplished. In this study, we developed the technique which measures the size, dielectric constant and position of nanostructures buried in the surface. We employed the electrostatic force measurement based on an AFM technique. AFM can measure the surface nanostructures on nm-scale. The electrostatic force depends on the thickness and dielectric constant of the nanostructures. We succeed to measure the thickness, dielectric constant and electric property of individual nanostructures buried in the substrate surface.