Nano-structured micro-power smart gas sensors

该项目旨在开发新一代智能硅基化学传感器，使用先进的纳米材料作为气敏层。与目前的商用固态气体传感器相比，这些新传感器将提供超低功耗（低于1 mW）、上级气体灵敏度（一个数量级）、完全CMOS兼容性和低单位成本，适用于大批量市场。我们将研究不同的纳米材料，如掺杂的碳纳米管，氧化锌纳米线，和介孔WO3的性能。我们将提高它们对污染气体的选择性，并最大限度地减少微热板面积，通过在高达750摄氏度的温度下动态运行实现超低功耗。该项目的重点是将新型纳米材料与SOI CMOS微电子和后CMOS微加工相结合的技术平台。H2、NH3、O3、CO2、NO2等重要的环境气体以及挥发性碳氢化合物（例如BTEX中的苯）将成为目标。

The project aims to develop a new generation of smart silicon-based chemical sensors using advanced nano-materials as gas sensitive layers. Compared to current commercial solid-state gas sensors, these new sensors will offer ultra low power consumption (below 1 mW), a superior sensitivity to gases (by one order of magnitude), full CMOS compatibility and low unit cost for high-volume markets. We will study the properties of different nano-materials, such as doped CNTs, ZnO nanowires, and mesoporous WO3. We will increase their selectivity to pollutant gases and minimise the microhotplate area to enable ultra low power consumption by operating dynamically at temperatures of up to 750 degC. The project focuses upon a technology platform that combines novel nano-materials with SOI CMOS microelectronics and post-CMOS micromachining. The environmentally important gases of H2, NH3, O3, CO2, NO2, and will be targeted as well as volatile hydrocarbons (e.g. benzene in BTEX).