Nano-structured micro-power smart gas sensors

该项目旨在开发新一代智能硅基化学传感器，使用先进的纳米材料作为气敏层。与目前的商用固态气体传感器相比，这些新型传感器将提供超低功耗（低于1兆瓦）、对气体的卓越灵敏度（提高一个数量级）、完全兼容CMOS以及适合大批量市场的低单位成本。我们将研究不同纳米材料的性能，如掺杂碳纳米管、ZnO纳米线和介孔WO3。我们将提高它们对污染气体的选择性，并最大限度地减少微热板面积，从而在高达750摄氏度的温度下动态运行，实现超低功耗。该项目专注于将新型纳米材料与SOI CMOS微电子和后CMOS微加工相结合的技术平台。环境重要气体H2， NH3, O3, CO2, NO2，以及挥发性碳氢化合物（例如BTEX中的苯）将成为目标。

The project aims to develop a new generation of smart silicon-based chemical sensors using advanced nano-materials as gas sensitive layers. Compared to current commercial solid-state gas sensors, these new sensors will offer ultra low power consumption (below 1 mW), a superior sensitivity to gases (by one order of magnitude), full CMOS compatibility and low unit cost for high-volume markets. We will study the properties of different nano-materials, such as doped CNTs, ZnO nanowires, and mesoporous WO3. We will increase their selectivity to pollutant gases and minimise the microhotplate area to enable ultra low power consumption by operating dynamically at temperatures of up to 750 degC. The project focuses upon a technology platform that combines novel nano-materials with SOI CMOS microelectronics and post-CMOS micromachining. The environmentally important gases of H2, NH3, O3, CO2, NO2, and will be targeted as well as volatile hydrocarbons (e.g. benzene in BTEX).