Nano-structured micro-power smart gas sensors

该项目旨在开发新一代智能硅基化学传感器，使用先进的纳米材料作为气敏层。与目前商用的固态气体传感器相比，这些新型传感器将提供超低功耗(低于1 mW)、对气体的卓越灵敏度(高出一个数量级)、完全的CMOS兼容性以及适用于大容量市场的低单位成本。我们将研究不同的纳米材料，如掺杂的碳纳米管、氧化锌纳米线和介孔WO_3的性质。我们将提高它们对污染气体的选择性，并将微热板面积降至最小，通过在高达750摄氏度的温度下动态运行来实现超低功耗。该项目致力于将新型纳米材料与SOI、CMOS微电子学和后CMOS微机械加工相结合的技术平台。对环境有重要影响的气体H2、NH3、O3、CO2、NO2以及挥发性碳氢化合物(如苯系物中的苯)将成为目标。

The project aims to develop a new generation of smart silicon-based chemical sensors using advanced nano-materials as gas sensitive layers. Compared to current commercial solid-state gas sensors, these new sensors will offer ultra low power consumption (below 1 mW), a superior sensitivity to gases (by one order of magnitude), full CMOS compatibility and low unit cost for high-volume markets. We will study the properties of different nano-materials, such as doped CNTs, ZnO nanowires, and mesoporous WO3. We will increase their selectivity to pollutant gases and minimise the microhotplate area to enable ultra low power consumption by operating dynamically at temperatures of up to 750 degC. The project focuses upon a technology platform that combines novel nano-materials with SOI CMOS microelectronics and post-CMOS micromachining. The environmentally important gases of H2, NH3, O3, CO2, NO2, and will be targeted as well as volatile hydrocarbons (e.g. benzene in BTEX).