Precision ion milling system

精密离子铣削系统

• 批准号: 345811-2007
• 负责人: Chaturvedi, Mahesh
• 金额: $ 8.97万
• 依托单位: University of Manitoba
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments - Category 1 (<$150,000)
• 财政年份: 2006
• 资助国家: 加拿大
• 起止时间: 2006-01-01 至 2007-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=325659
• 关键词: Precision; ion; milling; system

Microstructural examination is a fundamental step in any study dealing with the processing-properties-microstructures relationships in materials.  In this regard transmission electron microscopy (TEM) and high resolution transmission electron microscopy (HRTM) have become extremely powerful techniques for microstructural examination because of their ability to provide almost all of the microstructural, chemical and crystallographic data down to atomistic level. In any experimental study the quality of specimen, to a very large extent, determines the quality and reliability of the data obtained.  The quality of specimen is of even more paramount importance in microstructural studies using TEM/HRTM techniques.  Ion milling is a very reliable and commonly used method of preparing electron transparent TEM specimens of metals and alloys, composite materials, poly-phase semi-conductors and ceramics. In this technique a 40-50µm thick 3mm disc of material is eroded by Ar+ ions to produce electron transparent specimen.  An ion milling machine was acquired by the applicants in 1987 with the help of an NSERC grant, which suffered a major break down in the spring of 2006.  Because of its age - almost 20 years, it is not possible to repair it any further as the spare parts are no longer available.  Therefore, this request is being made to NSERC for the award of a grant to acquire an ion-milling machine and accessories to enable eight professors and their 27 graduate and 12 undergraduate students, and 6 post-doctoral fellows to continue to do research with the state-of-the-art TEM and FEG-HRTM facilities available in the Department of Mechanical and Manufacturing Engineering at the University of Manitoba.

显微组织检查是研究材料的加工-性能-微结构关系的基本步骤。在这方面，透射电子显微镜(TEM)和高分辨率电子显微镜(HRTM)已经成为非常强大的显微组织检查技术，因为它们能够提供几乎所有的微观结构、化学和结晶学数据，一直到原子水平。在任何实验研究中，样品的质量在很大程度上决定了所获得数据的质量和可靠性。在使用TEM/HRTM技术进行微观结构研究中，样品的质量更加重要。离子研磨是制备金属和合金、复合材料、多相半导体和陶瓷的电子透明电子显微镜样品的一种非常可靠和常用的方法。在这种技术中，40-50微米厚的3毫米材料圆盘被Ar+离子侵蚀以制造电子透明样品。1987年，申请者在NSERC的资助下获得了一台离子研磨机，这台机器在2006年春天发生了重大故障。但由于它的年龄-近20年，由于备件不再可用，不可能再对其进行维修。因此，向NSERC提出拨款，以获得一台离子研磨机和配件，以使8名教授和他们的27名研究生和12名本科生能够和6名博士后研究员继续利用马尼托巴大学机械与制造工程系最先进的透射电子显微镜和FEG-HRTM设备进行研究。