MRI: Development of a Versatile High Energy Resolution Ion Nanosope for Nanoscale Ion Spectroscopy, Ion-based Materials Fabrication and Ion Milling

技术摘要：利用稀有气体离子散射进行纳米级元素分析和材料改性的新研究仪器的发展为材料科学创造了迄今为止无法实现的机会。智力挑战包括工具的创建，理解高能离子-固体与纳米光束的相互作用，以及在材料分析和材料改性方面的应用。我们的项目整合了两项最新技术发展：蔡司ORION®He显微镜提供的聚焦纳米级离子束和Ionwerks®具有高通量的皮秒定时电子设备。分析应用包括单个纳米结构的首次离子束分析和横向膜均匀性的测定。该仪器还将用于材料修饰，例如用于单分子分析的基于石墨烯的计数器，用于量子计算的基于量子比特的超导结的开发以及纳米结构材料中缺陷行为的研究。还包括用于材料改性和样品制备的纳米级Ne束的开发，这是一种全新的离子束能力。这种光束可用于纳米尺度的离子铣削、纳米精度的半导体非晶化和注入、电子设备中“单离子扰动”的空间控制、用于聚变应用的颗粒间缺陷的新测试，以及由离子雕刻的石墨烯和其他二维材料制成的新材料。非技术摘要：纳米材料对基础科学和应用科学有着巨大的影响。意想不到的现象和功能正以越来越快的速度被发现和商业化利用。因此，需要新的实验工具来可靠地在同一水平上进行材料表征和改性。该项目通过开发用于真正的纳米级离子光谱、离子束材料改性和离子束铣削的多功能离子束设备，引入了重大进展。该项目整合了新的离子束技术，允许对单个纳米粒子进行分析，以及纳米结构的材料修改和离子雕刻和铣削，具有前所未有的空间控制，包括开发一种新的重离子纳米束。这代表了离子束导向材料科学的一次飞跃。新的科学和技术，如用于癌症药物递送的金纳米颗粒配体结合的研究，用于探索DNA测序的纳米孔的创建，以及用于先进计算和通信的量子结构的形成。该仪器提供的信息直接且直观，将通过发达的当地基础设施向中学生和高级研究生展示材料科学的兴奋之处。由于罗格斯大学拥有非常多样化的学生群体，该项目在吸引代表性不足的群体方面将特别有用。该仪器将为本科生提供开发和使用尖端科学设备的实践经验的绝佳机会，并丰富研究生课程。公众将通过开放日和讲座的方式参与进来。作为一种“独一无二”的仪器，该仪器将吸引纳米材料所涉及的各个领域的世界领导者。与其他最近获得NSF奖励的仪器一起，该仪器将使罗格斯大学成为纳米级显微镜的国家中心。

Technical abstract: The development of a new research instrument for nanoscale elemental analysis and materials modification using scattering of noble gas ions creates opportunities for materials science unachievable to date. Intellectual challenges include the creation of the tool, understanding energetic ion-solid interactions with a nano-beam, and applications, both in materials analysis and materials modification. Our project integrates two recent technological developments: Focused nanoscale ion beams available as the Zeiss ORION® He microscope and picosecond timing electronics with high throughput by Ionwerks®. Analysis applications include the first ion beam interrogation of individual nanostructures and determinations of lateral film uniformity. The instrument will also be used for materials modifications such as graphene based counters for single molecule analysis, development of qubit based superconducting junctions for quantum computing and studies of the behavior of defects within nano-structured materials. Also included is the development of nanoscale Ne beams for materials modification and sample preparation, an entirely new ion beam capability. Such beams may be used for ion milling on the nm scale, semiconductor amorphization and implantation with nm precision, spatial control of 'single ion upsets' in electronic devices, new tests of inter-granular defects for fusion applications and the creation of new materials from ion-carved graphene and other two dimensional materials. Non-technical abstract: Nanoscale materials have an enormous impact on basic and applied science. Unanticipated phenomena and functionalities are being discovered and exploited commercially at an ever increasing pace. New experimental tools are therefore needed to reliably perform materials characterization and modification at the same level. This project introduces a significant advance through the development of a versatile ion beam facility for true nano-scale ion spectroscopy, ion beam materials modification and ion beam milling. The project integrates new ion beam technologies to allow analysis of individual nano-particles as well as materials modification of nanostructures and ion sculpting and milling with unprecedented spatial control, involving the development of a new, heavy ion nano-beam. This represents a leap in ion beam oriented materials science. New science and technology is anticipated such as the investigation of the ligand binding of gold nanoparticles used in cancer drug delivery, the creation of nanometer orifices to explore DNA sequencing and the formation of quantum structures for advanced computing and communications.The direct and visually oriented nature of the information from this instrument will illustrate the excitement of materials science to students ranging from middle school to advanced graduate students through a well developed local infrastructure. As Rutgers has an extraordinarily diverse student body, the project will be particularly useful in attracting underrepresented groups. The instrument will provide excellent opportunities for hands-on experience in the development and use of sophisticated scientific equipment for undergraduate students and enrich the graduate curriculum. The general public will be involved through open houses and lectures. As a 'one of a kind' instrument this instrument will attract world leaders in the diverse fields addressed by nano-materials. Together with other recent NSF awarded instrumentation, this instrument will establish Rutgers as a national center for nano-scale microscopy.