contact stylus profiler for materials and MEMS devices metrology

用于材料和 MEMS 器件计量的接触式测针轮廓仪

• 批准号: 360042-2008
• 负责人: Guenat, Olivier
• 金额: $ 5.96万
• 依托单位: École Polytechnique de Montréal
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments - Category 1 (<$150,000)
• 财政年份: 2007
• 资助国家: 加拿大
• 起止时间: 2007-01-01 至 2008-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=363205
• 关键词: contact; stylus; profiler; materials; MEMS

Metrology is a critical validation step of the microfabrication processes and is essential for many studies in materials science. Because microfabrication implies multiple process steps, it is important to control the quality at all stages to be able to achieve a complete device. The requested instrument is a stylus profiler. By scanning a tip in contact with the surface of a substrate, we can get information on its topography. The information we can obtained from the collected data are the surface roughness, the height of a thin film deposited on a substrate, the depth a etched trench, the stress of a film or the planarity of the surface. Primarily oriented for microfabrication process control and characterization, including thin film deposition, the instrument will be installed in a cleanroom. The instrument will be managed by the Thin Film Research Labs which are central facilities accessible to all researchers. The stylus profiler will be use for bioMEMS, microfluidics, optical MEMS, thin film material properties analysis and erosion testing.

计量学是微细加工过程的关键验证步骤，对于材料科学的许多研究至关重要。由于微制造意味着多个工艺步骤，因此重要的是要控制所有阶段的质量，以便能够实现完整的器件。请求的仪器是触针式轮廓仪。通过扫描与衬底表面接触的针尖，我们可以获得其形貌信息。我们可以从收集的数据中获得的信息是表面粗糙度，沉积在衬底上的薄膜的高度，蚀刻沟槽的深度，薄膜的应力或表面的平面度。该仪器主要用于微加工过程控制和表征，包括薄膜沉积，将安装在洁净室中。该仪器将由薄膜研究实验室管理，这是所有研究人员都可以使用的中央设施。探针式轮廓仪将用于生物MEMS、微流体、光学MEMS、薄膜材料特性分析和腐蚀测试。