Automated ultrasonic coating system for micro/nanodevices

微纳器件自动化超声波镀膜系统

• 批准号: 374621-2009
• 负责人: Yeow, TzeWei(John)
• 金额: $ 10.83万
• 依托单位: University of Waterloo
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments - Category 1 (<$150,000)
• 财政年份: 2008
• 资助国家: 加拿大
• 起止时间: 2008-01-01 至 2009-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=411973
• 关键词: Automated; ultrasonic; coating; system; micro

The automated ultrasonic coating system requested in this Research Tools and Instruments application will be used to support the research program of the Advanced Micro/NanoDevices Lab (AMND) at the University of Waterloo. Currently, the lab is focused on understanding, modeling, designing, integrating, and developing all aspects of functional micro/nanodevices. All micro/nanodevices designed in the lab will require a coating layer for protection, sensing, or sealing purposes. In addition, the system will also be a critical piece of equipment that will be used for fabrication of microsensors and actuators. The proposed system is capable of uniformly spray coating any substrate with chemical or biological agents and nanomaterials. Nanomaterials or thin films such as nanotubes or parylene can be deposited to serve as a biocompatible sealing layer. In addition, biological agents such as DNAs and proteins can be uniformly deposited to serve as a sensing layer for micro/nanodevices.

本研究工具和仪器应用程序中要求的自动化超声波涂层系统将用于支持滑铁卢大学高级微/纳米器件实验室（AMND）的研究计划。目前，该实验室专注于理解，建模，设计，集成和开发功能微/纳米器件的各个方面。在实验室中设计的所有微/纳米器件都需要一个涂层，用于保护，传感或密封目的。此外，该系统也将是用于制造微传感器和致动器的关键设备。所提出的系统能够用化学或生物制剂和纳米材料均匀地喷涂任何基底。纳米材料或薄膜如纳米管或聚对二甲苯可以被沉积以用作生物相容性密封层。此外，生物制剂如DNA和蛋白质可以均匀沉积，以用作微/纳米器件的传感层。