Automated ultrasonic coating system for micro/nanodevices

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The automated ultrasonic coating system requested in this Research Tools and Instruments application will be used to support the research program of the Advanced Micro/NanoDevices Lab (AMND) at the University of Waterloo. Currently, the lab is focused on understanding, modeling, designing, integrating, and developing all aspects of functional micro/nanodevices. All micro/nanodevices designed in the lab will require a coating layer for protection, sensing, or sealing purposes. In addition, the system will also be a critical piece of equipment that will be used for fabrication of microsensors and actuators. The proposed system is capable of uniformly spray coating any substrate with chemical or biological agents and nanomaterials. Nanomaterials or thin films such as nanotubes or parylene can be deposited to serve as a biocompatible sealing layer. In addition, biological agents such as DNAs and proteins can be uniformly deposited to serve as a sensing layer for micro/nanodevices.