Load-locked E-Beam metal evaporator ffor AMPEL nanofabrication facility

用于 AMPEL 纳米加工设施的负载锁定电子束金属蒸发器

• 批准号: 376180-2009
• 负责人: Chrostowski, Lukas
• 金额: $ 10.85万
• 依托单位: University of British Columbia
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments - Category 1 (<$150,000)
• 财政年份: 2008
• 资助国家: 加拿大
• 起止时间: 2008-01-01 至 2009-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=412320
• 关键词: Load; locked; Beam; metal; evaporator

This grant application is for a critical equipment for the Advanced Materials and Process Engineering Laboratory (AMPEL) Nanofabrication Facility (ANF) -- a metal evaporator. The evaporator requested is a load-locked electron-beam evaporator, which will be used to deposit very high purity metals including Ti, Ni, Ge, Au, Pt, Al. The system features a load-lock that: a) allows the metals to be stored under vacuum, thus ensuring their purity, b) provides a much faster system pump-down, critical for a multi-user facility.

这项拨款申请是为先进材料和工艺工程实验室（AMPEL）纳米纤维设施（ANF）的关键设备-金属蒸发器。 所要求的蒸发器是负载锁定电子束蒸发器，将用于存款非常高纯度的金属，包括Ti，Ni，Ge，Au，Pt，Al。该系统具有负载锁定功能，该功能：a）允许金属在真空下储存，从而确保其纯度，B）提供更快的系统抽气，这对多用户设施至关重要。