Electronic characterization of composite materials for MEMS and nanoscale integration

用于 MEMS 和纳米级集成的复合材料的电子表征

• 批准号: 249677-2007
• 负责人: Oliver, Derek
• 金额: $ 1.25万
• 依托单位: University of Manitoba
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2009
• 资助国家: 加拿大
• 起止时间: 2009-01-01 至 2010-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=426021
• 关键词: Electronic; characterization; composite; materials; MEMS

Recent advances in microelectronic systems and devices have been driven by the integration of systems and functionality that cannot be directly provided by conventional microelectronics. One example of this is the functionality provided by a micro-electro-mechanical system (MEMS) that can be used as a resonant structure for low-power frequency referencing and/or filtering in a signal processing system. Developments of this nature rely heavily on understanding material properties separately and in combinations not found in nature - i.e. treating a composite material as a novel or 'artificial' material.

微电子系统和器件的最新进展是由传统微电子技术不能直接提供的系统和功能的集成所驱动的。其一个示例是由微机电系统（MEMS）提供的功能，其可以用作信号处理系统中的低功率频率参考和/或滤波的谐振结构。这种性质的发展在很大程度上依赖于对材料特性的单独理解和在自然界中未发现的组合-即将复合材料视为新型或“人造”材料。