Development, characterization, and demonstration of highly flexible hard magnetic nanocomposite polymers

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Polymers are supplanting silicon and glass for use in microelectromechanical systems (MEMS), microfluidic lab-on-a-chip (LOC) and micro total analysis systems (µTAS) for reasons of low cost, optical transparency, and biocompatibility. However, difficulties in including active materials for on-chip actuation have limited the commerical success of polymer-based systems. Magnetic actuation employing rare hard earth magnets is capable of high power, large displacement and bi-directional actuation. Over the last decade, there has been much interest among the microsystems industries to fabricate rare earth hard micromagnets for microscale devices. Rare earth micromagnets are attractive for many new and disruptive commercial microdevices in MEMS, RF-MEMS telecommunications, BioMEMS and µTAS. However, the main obstacle to their widespread use has been difficulties with compatibility of permanent magnetic materials with microsystems, especially polymer based systems.