Development of a Calibration Test Bed for MEMS Sensors

MEMS 传感器校准测试台的开发

• 批准号: 423357-2012
• 负责人: Golnaraghi, Farid
• 金额: $ 9.17万
• 依托单位: Simon Fraser University
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments - Category 1 (<$150,000)
• 财政年份: 2011
• 资助国家: 加拿大
• 起止时间: 2011-01-01 至 2012-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=495924
• 关键词: Development; Calibration; Test; Bed; MEMS

This proposal is in line with the applicants' long-term objective to establish an Intelligent Motion Tracking (IMT) research facility at the Mechatronic Systems Engineering program at Simon Fraser University (SFU). Thus far, the applicants are engaged in eight research projects in this area, and the requested equipment is directly related to both applicants' Discovery Grant proposed research. Over the past decade the applicants have worked in various projects towards development of mechatronics based "Smart Sensor Systems" for motion tracking (navigation), utilizing Micro-Electro-Mechanical-Systems (MEMS) sensors. The key sensors used for this purpose are inertial measurement units (IMU) that can be used to sense the motion of an object they are attached to. Conventional MEMS IMUs include tri-axial accelerometer - to sense acceleration in three directions (x-y-z) - and tri-axial rate gyros - to detect angular rates in three directions (roll-pitch-yaw). The accelerometers and gyroscope sensors used in the IMU are susceptible to various errors caused by inherent sensor design inconsistencies and cross-axis errors caused by device-mounting imperfections. Most importantly, MEMS sensors are inherently susceptible to changes in temperature due to the small structures within their design. As a result, thermal calibration of the IMU is a necessary task by subjecting the IMU to known temperature cycles and acquiring the IMU output data throughout the duration of thermal cycling.

该提案符合申请人的长期目标，即在西蒙弗雷泽大学（SFU）的机电系统工程项目中建立智能运动跟踪（IMT）研究设施。到目前为止，申请人在这一领域从事八个研究项目，所要求的设备与两个申请人的发现补助金拟议研究直接相关。在过去的十年中，申请人已经在各种项目中工作，以开发基于机电一体化的“智能传感器系统”，用于利用微机电系统（MEMS）传感器进行运动跟踪（导航）。用于此目的的关键传感器是惯性测量单元（IMU），可用于感测它们所连接的物体的运动。传统的MEMS伊穆斯包括三轴加速度计（用于感测三个方向（x-y-z）上的加速度）和三轴速率陀螺仪（用于检测三个方向（滚转-俯仰-偏航）上的角速率）。IMU中使用的加速度计和陀螺仪传感器容易受到由固有传感器设计不一致引起的各种误差以及由器件安装缺陷引起的交叉轴误差的影响。最重要的是，MEMS传感器由于其设计中的小结构而固有地容易受到温度变化的影响。因此，IMU的热校准是通过使IMU经受已知的温度循环并在整个热循环的持续时间内获取IMU输出数据的必要任务。