A new class of MEMS gyroscopes based on nonlinear coupling and internal resonance

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Micro-gyroscopes are the next major sensory application of the MEMS (Micro Electro Mechanical System) technology after the successful commercialization of pressure sensors and accelerometers. The most commercially used MEMS gyros employ a vibrating mass to detect angular rate through coupling of vibration modes of a structure. However, they often suffer from limited resolution and long-term drift. This is partly due to the small signals produced by these devices and manufacturing non-idealities. In this proposal we utilize nonlinear coupling and internal resonance to develop a new generation of vibratory MEMS gyroscopes. Using this idea, we have arrived at a macro T-beam design proof of concept that has a superior sense mode performance over its linear counterparts with significantly higher signal to noise ratio and enhanced sensitivity. Our T-beam micro designs have also demonstrated similar results - but also exhibit adverse behavior stemming from unwanted nonlinearities due to the electrostatic forces and the micro structural couplings, not observed in the macro-system. We plan to address these challenges through better models and designs. We are also proposing to use advanced designs to employ the same operating principles and deliver nonlinear, bulk-mode gyroscopes. By using bulk mode resonators, we will enhance the sensitivity of the gyroscope and suppress the noise. Another challenge that we faced was the development of suitable electronics to drive these nonlinear devices properly. We also plan to use active feedback of certain nonlinearities to strengthen the interaction between drive and sense modes and to cancel the "bad" nonlinearities. The outcome of this research will be a major breakthrough in the development of inexpensive gyros (for applications such as: cellphones, digital media and games, and wearable devices), and will transform a novel idea into a disruptive technology. The proposal falls best within NSERC Strategic target areas of Advanced Manufacturing and Human Interaction with Digital Media. Through working with an industrial partner with a successful commercialization track record, we define a research and technology roadmap for the large-scale production and commercialization.****