Precision Micromachining of 3D Components with Micro/Nano-Scale Features

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Component miniaturization is gaining more attention for a broad spectrum of products to achieve improved performance, increased multi-functionality, more customization, better marketability, savings in weight, cost, and space, etc. Component miniaturization also allows new products to emerge because further miniaturized products can open doors for new applications. The typical photolithographic and MEMS processes for fabricating micro and nano-scale prototypes have challenges that can result in costly delays, including slow and expensive processes (often taking months); and, their use is limited to a few, mainly silicon-based, materials. Current mechanical micromachining industry practice relies heavily on conventional CNC machining technologies, resulting in high capital investment, high energy and maintenance cost, non-optimal cutting conditions and inefficient processes. Also currently, understanding of the cutting mechanics and mechanisms at the micro-scale, know-how on process planning and fixturing for effective fabrication of complex 3D geometries, and development of process control technologies such as tool tip detection and cutting fluid application for micro-machining are still very much limited.