Dimension and Surface Characterization of Precision Micromachined 3D Components with Micro/Nano-Scale Features

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Miniaturization of products in a wide range of sectors including biomedical, electronics, and aerospace applications have dramatically increased the need to fabricate complex 3D parts with features smaller than a micron to a high relative accuracy in a diverse set of materials including stainless steel, titanium, ceramics, polymers, etc. The research program at the Laboratory of Advanced Multiscale Manufacturing (LAMM) focuses on understanding, modeling, and developing micromachining processes and systems particularly suitable for precision machining of 3D components with a variety of geometries and features at the micro/nano-scale. For improved performance of emerging miniaturized products, cost-effective batch production and accuracy of small parts plays a critical role in success of the product in the market. Proper understanding and modeling of the micromachining processes are required to achieve the optimum process conditions for better accuracy and surface quality. Development and optimization of effective process plans and process control systems as well as a machinability database for a wide range of engineering materials are also critical for cost-effective and automated batch production of a given part. Currently, the research program concentrates on mechanical micro-milling and femtosecond laser machining processes.