Precision Micromachining of 3D Components with Micro/Nano-Scale Features

具有微米/纳米级特征的 3D 部件的精密微加工

• 批准号: 360523-2013
• 负责人: Jun, MartinByungGuk
• 金额: $ 1.89万
• 依托单位: University of Victoria
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2015
• 资助国家: 加拿大
• 起止时间: 2015-01-01 至 2016-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=572782
• 关键词: Precision; Micromachining; 3D; Components; Micro

Component miniaturization is gaining more attention for a broad spectrum of products to achieve improved performance, increased multi-functionality, more customization, better marketability, savings in weight, cost, and space, etc. Component miniaturization also allows new products to emerge because further miniaturized products can open doors for new applications. The typical photolithographic and MEMS processes for fabricating micro and nano-scale prototypes have challenges that can result in costly delays, including slow and expensive processes (often taking months); and, their use is limited to a few, mainly silicon-based, materials. Current mechanical micromachining industry practice relies heavily on conventional CNC machining technologies, resulting in high capital investment, high energy and maintenance cost, non-optimal cutting conditions and inefficient processes. Also currently, understanding of the cutting mechanics and mechanisms at the micro-scale, know-how on process planning and fixturing for effective fabrication of complex 3D geometries, and development of process control technologies such as tool tip detection and cutting fluid application for micro-machining are still very much limited. We aim to design and develop effective micromachining processes and systems particularly suitable for precision machining of 3D components in diverse engineering materials with a variety of geometries and features at the micro/nano-scale. We will focus on the following short term objectives: (a) Improve the models developed for micro-milling to be applicable for micro-drilling operations; (b) Conduct machinability studies on various engineering materials including ceramics and glass for both micro-milling and femtosecond laser machining; (c) Develop CNC simulation and control software for effective tool path generation for both systems; (d) Integrate cutting fluid delivery and touch-off systems to the controller for automated control; (e) Automate measurement of component dimensions with the micro-probing system developed at UVic; and (f) Optimize the micromachining process.

组件小型化正受到越来越多的关注，以实现更广泛的产品，以实现更高的性能，增加多功能，更多的定制，更好的适销性，节省重量，成本和空间等。组件小型化也允许新产品的出现，因为进一步的小型化产品可以为新的应用打开大门。用于制造微米和纳米级原型的典型光刻和MEMS工艺具有可能导致代价高昂的延迟的挑战，包括缓慢和昂贵的工艺(通常需要几个月)；而且，它们的使用仅限于少数材料，主要是硅基材料。目前的机械微加工工业实践严重依赖于传统的数控加工技术，导致高资本投资、高能量和高维护成本、非最佳的切割条件和低效率的工艺。此外，目前对微观尺度上的切割机理和机理的了解、有效制造复杂三维几何形状的工艺规划和夹具技术以及用于微加工的刀尖检测和切削液应用等过程控制技术的发展仍然非常有限。 我们的目标是设计和开发高效的微加工工艺和系统，特别适合于在微纳尺度上精密加工具有各种几何和特征的不同工程材料的3D部件。我们将重点关注以下短期目标：(A)改进为微细铣削开发的模型，使其适用于微钻孔操作；(B)对包括陶瓷和玻璃在内的各种工程材料进行微细铣削和飞秒激光加工的可加工性研究；(C)为这两个系统开发数控仿真和控制软件，以便有效地生成刀具路径；(D)将切削液输送和触发系统集成到控制器中，以进行自动化控制；(E)利用紫外光开发的微探测系统，自动测量零件尺寸；以及(F)优化微加工过程。