Application of pulsed laser-produced multi-charged ion beams for advanced Ion implantation processes in materials science

脉冲激光产生的多电荷离子束在材料科学中先进离子注入工艺中的应用

• 批准号: 531462-2018
• 负责人: Antici, Patrizio
• 金额: $ 1.82万
• 依托单位: Institut national de la recherche scientifique
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2018
• 资助国家: 加拿大
• 起止时间: 2018-01-01 至 2019-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=644020
• 关键词: Application; pulsed; laser; produced; multi

Plasmionique Inc. is a Canadian leader in the development and manufacturing of plasma-based systems for**materials synthesis and advanced surface engineering applications. Plasmionique has identified an opportunity**to expand its product line using intense multi-charged ion beams as generated by laser-plasma generation, to**address emerging needs for surface engineering on nanoscale. There are considerable technological challenges**in this technology, such as increasing the current of the ion beams, generating simultaneously multi-charged**ions, and focusing down or expanding the beams, and most importantly, controlling the energy.**This ENGAGE project aims to evaluate the feasibility of using pulsed multi-charged ion beams, as produced by**interaction of an intense laser with a solid target, test the concept of ion current density amplification using a**magnetic field, and try to prove its superiority for producing higher density of multi-charged ions, compared to**conventional sources (see attached paper). This methodology could provide a novel route to surface treatment**processes. However, before implementation, some essential questions must be addressed: What current can be**achieved by the ions ? What charge states can be produced and used in the technology ? Up to what sizes can**they be focused down or expanded, as needed ? By using advanced characterization techniques, we will**comparatively assess the parameters of the different multispecies ion beams tailored specifically for being used**in this technique. We also want to evaluate if the use of magnetic fields can allow increasing the particle beam**and as such lowering the cost of the laser-infrastructure.**The proposed project capitalizes on the unique ALLS laser infrastructure located at INRS and on the PI's**established expertise in several fields such as ion-production, beam handling, laser-matter interactions, a**combination of knowledge that is critical to the success of this endeavor.

Plasmionique Inc.是加拿大领先的等离子体系统开发和制造商，用于 ** 材料合成和先进的表面工程应用。Plasmionique已经确定了一个机会 **，可以利用激光等离子体产生的强多电荷离子束来扩展其产品线，以 ** 满足纳米级表面工程的新兴需求。在这项技术中存在相当大的技术挑战 **，例如增加离子束的电流，同时产生多电荷离子 **，以及聚焦或扩展束，最重要的是，控制能量。该ENGAGE项目旨在评估使用脉冲多电荷离子束的可行性，如强激光与固体靶相互作用产生的脉冲多电荷离子束，测试使用磁场的离子电流密度放大的概念，并试图证明与传统源相比，它在产生更高密度的多电荷离子方面的优越性（见所附文件）。这种方法可以为表面处理工艺提供一种新的途径。然而，在实施之前，必须解决一些基本问题：离子可以实现什么电流？在该技术中可以产生和使用哪些电荷状态？根据需要，它们可以集中或扩展到什么大小？通过使用先进的表征技术，我们将 ** 比较评估不同的多种类离子束的参数，专门用于 ** 在这项技术。我们还想评估磁场的使用是否可以增加粒子束 **，从而降低激光基础设施的成本。拟议的项目利用了位于INRS的独特的ALLS激光基础设施和PI在离子产生、光束处理、激光物质相互作用等几个领域的专业知识，这些知识的结合对这项奋进的成功至关重要。