Application of pulsed laser-produced multi-charged ion beams for advanced Ion implantation processes in materials science

点击翻译按钮获取中文摘要

Plasmionique Inc. is a Canadian leader in the development and manufacturing of plasma-based systems for**materials synthesis and advanced surface engineering applications. Plasmionique has identified an opportunity**to expand its product line using intense multi-charged ion beams as generated by laser-plasma generation, to**address emerging needs for surface engineering on nanoscale. There are considerable technological challenges**in this technology, such as increasing the current of the ion beams, generating simultaneously multi-charged**ions, and focusing down or expanding the beams, and most importantly, controlling the energy.**This ENGAGE project aims to evaluate the feasibility of using pulsed multi-charged ion beams, as produced by**interaction of an intense laser with a solid target, test the concept of ion current density amplification using a**magnetic field, and try to prove its superiority for producing higher density of multi-charged ions, compared to**conventional sources (see attached paper). This methodology could provide a novel route to surface treatment**processes. However, before implementation, some essential questions must be addressed: What current can be**achieved by the ions ? What charge states can be produced and used in the technology ? Up to what sizes can**they be focused down or expanded, as needed ? By using advanced characterization techniques, we will**comparatively assess the parameters of the different multispecies ion beams tailored specifically for being used**in this technique. We also want to evaluate if the use of magnetic fields can allow increasing the particle beam**and as such lowering the cost of the laser-infrastructure.**The proposed project capitalizes on the unique ALLS laser infrastructure located at INRS and on the PI's**established expertise in several fields such as ion-production, beam handling, laser-matter interactions, a**combination of knowledge that is critical to the success of this endeavor.