Application of pulsed laser-produced multi-charged ion beams for advanced Ion implantation processes in materials science

Plamionique Inc.是加拿大开发和制造用于**材料合成和先进表面工程应用的等离子系统的领先者。Plamionique已经确定了**利用激光等离子体产生的强多电荷离子束**扩展其产品线的机会，以**满足纳米级表面工程的新需求。在这项技术中有相当大的技术挑战**，如增加离子束的电流，同时产生多电荷**离子，聚焦或扩大束流，最重要的是控制能量。**该项目旨在评估使用强激光与固体靶相互作用产生的脉冲多电荷离子束的可行性，测试使用**磁场的离子电流密度放大的概念，并试图证明其相对于**传统来源产生更高密度的多电荷离子的优越性(见附文)。这种方法可以为表面处理**工艺提供一种新的途径。然而，在实施之前，必须解决一些基本问题：离子可以**实现什么电流？在这项技术中可以产生和使用什么电荷状态？根据需要，它们可以**调低或扩展到多大？通过使用先进的表征技术，我们将**比较评估专门为这项技术**使用的不同多物种离子束的参数。我们还想评估使用磁场是否可以增加粒子束**，从而降低激光基础设施的成本。**拟议的项目利用了位于INRS的独特的ALL激光基础设施，以及PI在离子生产、光束处理、激光-物质相互作用等多个领域**的成熟专业知识，**这些知识的组合对这项工作的成功至关重要。

Plasmionique Inc. is a Canadian leader in the development and manufacturing of plasma-based systems for**materials synthesis and advanced surface engineering applications. Plasmionique has identified an opportunity**to expand its product line using intense multi-charged ion beams as generated by laser-plasma generation, to**address emerging needs for surface engineering on nanoscale. There are considerable technological challenges**in this technology, such as increasing the current of the ion beams, generating simultaneously multi-charged**ions, and focusing down or expanding the beams, and most importantly, controlling the energy.**This ENGAGE project aims to evaluate the feasibility of using pulsed multi-charged ion beams, as produced by**interaction of an intense laser with a solid target, test the concept of ion current density amplification using a**magnetic field, and try to prove its superiority for producing higher density of multi-charged ions, compared to**conventional sources (see attached paper). This methodology could provide a novel route to surface treatment**processes. However, before implementation, some essential questions must be addressed: What current can be**achieved by the ions ? What charge states can be produced and used in the technology ? Up to what sizes can**they be focused down or expanded, as needed ? By using advanced characterization techniques, we will**comparatively assess the parameters of the different multispecies ion beams tailored specifically for being used**in this technique. We also want to evaluate if the use of magnetic fields can allow increasing the particle beam**and as such lowering the cost of the laser-infrastructure.**The proposed project capitalizes on the unique ALLS laser infrastructure located at INRS and on the PI's**established expertise in several fields such as ion-production, beam handling, laser-matter interactions, a**combination of knowledge that is critical to the success of this endeavor.