New Micromanipulation Technologies via Large-Gap Magnetic Levitation and Off-Board Force Determination

微操纵器通常用于在医学、生物学、电子学、微装配和光学等各个领域操纵微米大小的物体。传统的丝杠式、齿轮式或电机式微机械臂有许多缺点，如由于运动机械部件的摩擦而产生的摩擦力、间隙和滞后。磁悬浮是一种很有前途的技术，可以应用于微操作，由于它不包含运动和连接部件，完全消除了摩擦引起的磨损和维护问题，保证了无尘运行，是一种清洁技术。提出的研究计划旨在利用磁悬浮机器人微机械臂开发一种新的微操作技术，以克服传统微机械臂的这些局限性。该系统仅采用单轴电磁作动器，通过调节产生的磁场，实现大磁隙内物体的三维运动。三维运动中磁场的耦合效应是精密微操作的一个主要问题。设计并应用先进的解耦控制算法来增强微机器人在水平平面上的运动控制。利用悬浮微机器人与丝杠微机械臂配合进行微翻译和微装配的亚微米力控协同操作也将实现。与传统的微机械臂相比，使用悬浮机器人进行协作操作的主要优点是悬浮机器人对被操纵物体的作用力是柔顺的，可以防止对脆弱物体的损坏。****以下是提出的研究计划的新方面：a)将开发用于微操作的新型大间隙磁悬浮装置和技术；b)将测试一种独特的传感器切换3D运动控制方法，以解决光束或相机视觉阻塞问题；c)将引入一种创新的基于磁通量的接触力测定方法；d)首次使用磁悬浮微机器人和丝杠微机械臂实现内力控制协同操作。****这项研究计划将导致发明一种新的微操作技术作为一个长期目标。共有11名高素质人才（3名博士，2名硕士，6名本科生研究助理和合作学生）将在探索研究项目的过程中接受培训。这些学生将在机电一体化、机器人、系统集成和自动化等领域熟练掌握最先进的分析和实验技术。他们的加入将有助于加拿大汽车、电子、软件和制造业技术部门的增长和进步。********

Micromanipulators are commonly used for manipulation of micrometer sized objects in various fields such as medical, biology, electronics, microassembly, and optics. Conventional leadscrew, gear, or motor type micromanipulators have many disadvantages, such as the incursion of stiction, backlash, and hysteresis due to the friction of moving mechanical parts. Magnetic levitation is a promising technology that can be applied for micromanipulation, and since it does not contain moving and jointed parts, wear and maintenance problems caused by friction are completely eliminated, and dust-free operation is ensured, i.e., a clean technology. The proposed research program aims to develop a novel micromanipulation technology using magnetically levitated robotic micromanipulators to overcome these limitations of conventional micromanipulators. The system uses only single-axis electromagnetic actuators, and by regulation of produced magnetic fields, the 3D motion of objects in a large magnetic gap will be realized. The coupling effect of magnetic fields in 3D motion is a major issue for precision micromanipulation. Advanced decouple control algorithms will be designed and applied to enhance the motion control of the microrobot in horizontal planes. Submicron force-controlled collaborative manipulation using a levitated microrobot in concert with a leadscrew micromanipulator for microtranslation and microassembly will also be realized. The main advantage of using a levitation robot for collaborative manipulation over conventional micromanipulators is that the force of a levitation robot on the manipulated object is compliant, which can prevent damage to delicate objects.****The following are novel aspects of the proposed research program: a) A novel large-gap magnetic levitation apparatus and technique will be developed for micromanipulation; b) A unique approach to sensor switching 3D motion control will be tested to solve the problem of optical beam or camera vision blockage; c) An innovative magnetic-flux-based contact force determination will be introduced; d) For the first time, internal force-controlled collaborative manipulation will be realized using a magnetically levitated microrobot and a leadscrew micromanipulator.****This research program will lead to the invention of a new micromanipulation technology as a long term goal. A total of eleven highly qualified personnel (3 PhD, 2 MASc, and 6 undergraduate research assistant and co-op students) will be trained over the course of this Discovery research program. These students will become skilled in state-of-the-art analytical and experimental techniques within the fields of mechatronics, robotics, systems integration, and automation. Their entry into the workforce will contribute to the growth and advancement of the Canadian technology sectors in automotive, electronics, software, and manufacturing industries.********