Refurbishment of a 17-Year Old E-Beam Evaporator System

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The purpose of this Research Tool and*Instruments (RTI) application is to request a grant to refurbish a 17-year old*E-beam Evaporator System. The system is*located in the Center for Integrated RF Engineering (CIRFE) clean room facility*at the University of Waterloo, which is dedicated to the fabrication of micro*and nano devices. The E-beam evaporator system*is used for deposition of thin film metals such as gold, silver, chrome, titanium,*tungsten, etc. Over the past 17 years,*this system has been the workhorse of the CIRFE clean room and has been an*essential tool for successfully completing many fabrication processes and developing*a wide range of novel devices. After going through few repair cycles over the*past 17 years, some of the system hardware components are no longer commercially*available. It became clear that the system needs an overall refurbishment to get*it to the proper operational state. *** ***The system benefits more than 20 faculty*members and their graduate students at the University of Waterloo who currently*use the fabrication services of the CIRFE clean room. It also benefits other researchers in Canada*who access the CIRFE clean room for thin film deposition services. *****