Refurbishment of a 17-Year Old E-Beam Evaporator System

翻新已有 17 年历史的电子束蒸发器系统

• 批准号: RTI-2019-00527
• 负责人: Mansour, Raafat
• 金额: $ 3.65万
• 依托单位: University of Waterloo
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments
• 财政年份: 2018
• 资助国家: 加拿大
• 起止时间: 2018-01-01 至 2019-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=658679
• 关键词: Refurbishment; 17; Year; Old; Beam

The purpose of this Research Tool and*Instruments (RTI) application is to request a grant to refurbish a 17-year old*E-beam Evaporator System. The system is*located in the Center for Integrated RF Engineering (CIRFE) clean room facility*at the University of Waterloo, which is dedicated to the fabrication of micro*and nano devices. The E-beam evaporator system*is used for deposition of thin film metals such as gold, silver, chrome, titanium,*tungsten, etc. Over the past 17 years,*this system has been the workhorse of the CIRFE clean room and has been an*essential tool for successfully completing many fabrication processes and developing*a wide range of novel devices. After going through few repair cycles over the*past 17 years, some of the system hardware components are no longer commercially*available. It became clear that the system needs an overall refurbishment to get*it to the proper operational state. *** ***The system benefits more than 20 faculty*members and their graduate students at the University of Waterloo who currently*use the fabrication services of the CIRFE clean room. It also benefits other researchers in Canada*who access the CIRFE clean room for thin film deposition services. *****

本研究工具和*仪器(RTI)应用程序的目的是申请一笔赠款，以翻新已有17年历史的*电子束蒸发器系统。该系统位于滑铁卢大学的集成射频工程中心(CIRFE)洁净室设施中，该中心致力于制造微/纳米器件。电子束蒸发器系统*用于沉积金、银、铬、钛、*钨等薄膜金属。在过去的17年里，该系统一直是CIRFE洁净室的主力设备，也是成功完成许多制造工艺和开发*各种新型器件的*必不可少的工具。在过去17年里经历了几次维修周期后，一些系统硬件组件不再*商业上可用。很明显，该系统需要进行一次全面的整修，才能使其处于适当的运行状态。*该系统使滑铁卢大学的20多名教职员工和他们的研究生受益，他们目前*正在使用CIRFE洁净室的制造服务。这也使加拿大*的其他研究人员受益，他们使用CIRFE净化室进行薄膜沉积服务。*****