Advanced CMOS-MEMS RF Devices

先进的 CMOS-MEMS 射频器件

• 批准号: RGPIN-2015-04263
• 负责人: Mansour, Raafat
• 金额: $ 4.23万
• 依托单位: University of Waterloo
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2020
• 资助国家: 加拿大
• 起止时间: 2020-01-01 至 2021-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=707976
• 关键词: Advanced; CMOS; MEMS; RF; Devices

The proposed research program addresses the integration of Micro-Electro-Mechanical systems (MEMS) with the Complementary Metal Oxide Semiconductor (CMOS) technology to introduce a new class of radio frequencies (RF) devices and instrumentation. The approach leverages the myriad of economic benefits of integrated miniaturized systems with dual electrical and mechanical functionality. Scanning Probe Microscopy (SPM) is used to image material surfaces for the purpose of understanding their molecular structure. Over the past two decades, several forms of SPM have been introduced for imaging and measuring the electric and magnetic properties of surfaces at the nano-scale including the Scanning Tunneling Microscope (STM), the Atomic Force Microscope (AFM) and the Scanning Microwave Microscope (SMM). In particular, the SMM has emerged as an essential tool for mapping material physical properties, such as conductivity and dielectric permittivity. Commercial Scanning Microwave Microscopes are bulky and very expensive. The use of CMOS-MEMS technology allows the realization of highly miniature low cost SMMs. The focus of the proposed research program is to develop CMOS-MEMS chip-scale scanning microwave microscopes capable of operating both in the reflection and transmission modes, which will allow the imaging of both surfaces and sub-surfaces at the nano-scale. The research program also explores the use of new concepts for position sensing and the development of high Q mechanical resonators for enhancing resolution and imaging speeds. The anticipated outcome is to produce chip-scale devices that have a comparable resolution to state-of-the-art instruments, but at an unprecedented fraction of the cost. This research program will contribute to the training of students at the Masters and PhD levels, providing the skills to compete globally in the fields of MEMS and nanotechnology engineering as new applications emerge over the next 5 to 10 years. Graduates trained on the requested infrastructure will be able to transfer their knowledge to Canadian industry, assist companies in recognizing the impact of this research, and acquire the knowledge to be future industry leaders in this expanding technology area. .

拟议的研究计划旨在将微电子机械系统(MEMS)与互补金属氧化物半导体(CMOS)技术相结合，以引入一类新的射频(RF)设备和仪器。该方法充分利用了具有电气和机械双重功能的集成小型化系统所带来的众多经济效益。 扫描探针显微镜(SPM)用于对材料表面进行成像，以了解其分子结构。在过去的二十年里，人们引入了几种形式的扫描隧道显微镜(STM)、原子力显微镜(AFM)和扫描微波显微镜(SMM)来在纳米尺度上成像和测量表面的电磁性质。特别是，SMM已经成为绘制材料物理属性(如导电性和介电常数)的重要工具。商用扫描微波显微镜体积庞大，价格昂贵。采用CMOSMEMS技术可以实现超小型化、低成本的SMM。 提出的研究计划的重点是开发能够在反射和透射式模式下工作的CMOSMEMS芯片级扫描微波显微镜，这将允许表面和亚表面在纳米尺度上成像。该研究计划还探索了位置传感的新概念的使用，以及为提高分辨率和成像速度而开发的高Q机械谐振器。预计的结果是生产出与最先进的仪器分辨率相当的芯片级设备，但成本却是前所未有的一小部分。 这一研究计划将有助于培养硕士和博士水平的学生，提供在未来5至10年内出现新应用时在MEMS和纳米技术工程领域进行全球竞争的技能。接受所需基础设施培训的毕业生将能够将他们的知识转移到加拿大的行业，帮助公司认识到这项研究的影响，并获得在这一不断扩大的技术领域成为未来行业领导者的知识。 。