Advanced CMOS-MEMS RF Devices

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The proposed research program addresses the integration of Micro-Electro-Mechanical systems (MEMS) with the Complementary Metal Oxide Semiconductor (CMOS) technology to introduce a new class of radio frequencies (RF) devices and instrumentation. The approach leverages the myriad of economic benefits of integrated miniaturized systems with dual electrical and mechanical functionality. Scanning Probe Microscopy (SPM) is used to image material surfaces for the purpose of understanding their molecular structure. Over the past two decades, several forms of SPM have been introduced for imaging and measuring the electric and magnetic properties of surfaces at the nano-scale including the Scanning Tunneling Microscope (STM), the Atomic Force Microscope (AFM) and the Scanning Microwave Microscope (SMM). In particular, the SMM has emerged as an essential tool for mapping material physical properties, such as conductivity and dielectric permittivity. Commercial Scanning Microwave Microscopes are bulky and very expensive. The use of CMOS-MEMS technology allows the realization of highly miniature low cost SMMs. The focus of the proposed research program is to develop CMOS-MEMS chip-scale scanning microwave microscopes capable of operating both in the reflection and transmission modes, which will allow the imaging of both surfaces and sub-surfaces at the nano-scale. The research program also explores the use of new concepts for position sensing and the development of high Q mechanical resonators for enhancing resolution and imaging speeds. The anticipated outcome is to produce chip-scale devices that have a comparable resolution to state-of-the-art instruments, but at an unprecedented fraction of the cost. This research program will contribute to the training of students at the Masters and PhD levels, providing the skills to compete globally in the fields of MEMS and nanotechnology engineering as new applications emerge over the next 5 to 10 years. Graduates trained on the requested infrastructure will be able to transfer their knowledge to Canadian industry, assist companies in recognizing the impact of this research, and acquire the knowledge to be future industry leaders in this expanding technology area. .