Development of Optical MEMS Pressure Sensor Technology for High Temperature Applications

开发适用于高温应用的光学 MEMS 压力传感器技术

• 批准号: 522088-2018
• 负责人: Nieva, Patricia
• 金额: $ 1.82万
• 依托单位: University of Waterloo
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2018
• 资助国家: 加拿大
• 起止时间: 2018-01-01 至 2019-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=660951
• 关键词: Development; Optical; MEMS; Pressure; Sensor

Pressure sensing in plastic injection molding is critical to the quality of manufactured consumer and commercial goods and need**to be able to operate up to temperatures of 350°C and pressures up to 10,000 psi. To operate in this very harsh environment our**pressure sensors utilize a membrane to infer pressure and depending on the conditions, the membrane may be directly exposed**to the load, but in the majority of cases, pressure transfer fluids such as mercury, are often used to protect the sensor from the**high temperature of the plastic melt and to facilitate remote sensing. However, the use of pressure transfer fluids reduces the**accuracy of the sensor and mercury is restricted in Canada and many other countries.**The objective of the proposed project is to investigate the feasibility of expanding our pressure transducer production line by**offering a family of optical Micro Electro Mechanical Systems (MEMS) pressure sensors able to operate at these extreme high**temperatures with improved accuracy and without the need of pressure transfer fluids. This new sensor line will also be designed**to use our proprietary harsh environment packaging assembly, thus significantly reducing the production costs and time to marketshare.**In the longer term, outcomes of the described research collaboration will result in significant cost reduction for the**development of new commercial lines of sensors, along with the development of mercury free, higher quality and more accurate**science-based sensor products.

塑料注塑成型中的压力传感对制成品和商业产品的质量至关重要，需要 ** 能够在高达350°C的温度和高达10，000 psi的压力下工作。为了在这种非常恶劣的环境中工作，我们的压力传感器利用薄膜来推断压力，并且根据条件，薄膜可能直接暴露于负载，但在大多数情况下，压力传递流体（如汞）通常用于保护传感器免受塑料熔体的高温影响，并促进遥感。然而，压力传递液的使用会降低传感器的 ** 准确性，并且加拿大和许多其他国家/地区对汞进行限制。**该项目的目标是研究通过提供一系列光学微机电系统（MEMS）压力传感器来扩大我们的压力传感器生产线的可行性，这些传感器能够在这些极高的温度下工作，提高精度，而不需要压力传递流体。这一新的传感器系列还将设计 ** 使用我们专有的恶劣环境封装组件，从而大大降低生产成本和市场份额的时间。从长远来看，上述研究合作的成果将大大降低 ** 开发新的商业传感器系列的成本，沿着无汞、更高质量和更准确的 ** 科学传感器产品的开发。