A System for Optical Characterization of Complex MEMS

复杂 MEMS 光学表征系统

• 批准号: RTI-2023-00328
• 负责人: AbdelRahman, Eihab
• 金额: $ 10.84万
• 依托单位: University of Waterloo
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments
• 财政年份: 2022
• 资助国家: 加拿大
• 起止时间: 2022-01-01 至 2023-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=765904
• 关键词: System; Optical; Characterization; Complex; MEMS

My research group studies Micro-Electro-Mechanical Systems (MEMS) to develop micro sensors and actuators. We are one of the leading groups internationally in the dynamics, vibrations, and control of electrostatic MEMS. Some of our achievements in this field over the last decade are: (i)Developing bifurcation-based gas sensors. We also pioneered their use as binary gas sensors that detect whether a gas concentration exceeds a threshold value or not via binary (0/1) output, thereby eliminating the need for readout electronics. (ii)Large signal sensors that expand the dynamic range beyond the traditional limits of power handling capacity by developing detection methods that coup with multivalued responses. (iii)Deformable micromirrors that eliminate the need for independent actuators and reduce actuation complexity. (ii) Electrostatic Atomic Force Microscopes (AFM). We demonstrated all-electric AFMs built out of PCBs and off-shelf probes at a cost of few hundred dollars. (iii) Methods to transparently (independently) combine electrostatic and electromagnetic actuation in MEMS [4]. We exploited the independence of electrostatic and electromagnetic actuation to develop novel tunable magnetic field strength sensors. (iv) Close-loop control of MEMS long-stroke actuators and a micromirrors. (v) Impact dynamics of electrostatic MEMS actuators. We recently reported the discovery of a new classes of intermittencies and pull-in instabilities. We will use the requested system to design, test, and characterize MEMS: - inertial sensors: gyroscopes, magnetic field sensors, gas sensors, and chemical sensors - actuators: deformable micromirrors, grating micromirrors, and micro tweezers It will allow us to test them in air and aqueous media as well as encapsulated in vacuum packaging. The sensors and actuators will be actuated electrically and sensed using the vibrometer. The typical test setup is made of a Signal Generator for drive signal generation, a signal amplifier, a vacuum or water test chamber where needed, and a Vibrometer for wide frequency-domain modal analysis. The former items are available in my laboratory and the latter item is being requested under this proposal.

我的研究小组研究微型机电系统(MEMS)，以开发微型传感器和执行器。我们在静电MEMS的动力学、振动和控制方面是国际领先的集团之一。在过去的十年中，我们在这一领域取得的一些成就包括：(I)开发基于分叉的气体传感器。我们还率先将它们用作二进制气体传感器，通过二进制(0/1)输出检测气体浓度是否超过阈值，从而消除了对读出电子设备的需求。(2)大信号传感器，通过开发与多值响应相一致的检测方法，将动态范围扩大到传统的功率处理能力限制之外。(3)可变形微镜，消除了对独立致动器的需要，降低了致动复杂性。(2)静电原子力显微镜(AFM)。我们展示了用多氯联苯和现成的探头制成的全电动原子力显微镜，花费了几百美元。(Iii)在MEMS中透明地(独立地)结合静电和电磁驱动的方法[4]。我们利用静电和电磁驱动的独立性，研制出新型可调谐磁场强度传感器。(4)MEMS长行程执行器和微镜的闭环控制。(V)静电MEMS执行器的冲击动力学。我们最近报道了一类新的间歇和拉入不稳定的发现。我们将使用所要求的系统来设计、测试和表征MEMS：-惯性传感器：陀螺仪、磁场传感器、气体传感器和化学传感器-致动器：可变形微镜、光栅微镜和微镊子它将使我们能够在空气和水介质中以及在真空封装中对它们进行测试。传感器和执行器将通过电驱动，并使用振动计进行检测。典型的测试装置由一个用于产生驱动信号的信号发生器、一个信号放大器、一个真空或水试验室(如果需要)和一个用于宽频域模式分析的振动计组成。前一种物品在我的实验室里有，后一种物品是根据这项提议要求的。