A System for Optical Characterization of Complex MEMS

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My research group studies Micro-Electro-Mechanical Systems (MEMS) to develop micro sensors and actuators. We are one of the leading groups internationally in the dynamics, vibrations, and control of electrostatic MEMS. Some of our achievements in this field over the last decade are: (i)Developing bifurcation-based gas sensors. We also pioneered their use as binary gas sensors that detect whether a gas concentration exceeds a threshold value or not via binary (0/1) output, thereby eliminating the need for readout electronics. (ii)Large signal sensors that expand the dynamic range beyond the traditional limits of power handling capacity by developing detection methods that coup with multivalued responses. (iii)Deformable micromirrors that eliminate the need for independent actuators and reduce actuation complexity. (ii) Electrostatic Atomic Force Microscopes (AFM). We demonstrated all-electric AFMs built out of PCBs and off-shelf probes at a cost of few hundred dollars. (iii) Methods to transparently (independently) combine electrostatic and electromagnetic actuation in MEMS [4]. We exploited the independence of electrostatic and electromagnetic actuation to develop novel tunable magnetic field strength sensors. (iv) Close-loop control of MEMS long-stroke actuators and a micromirrors. (v) Impact dynamics of electrostatic MEMS actuators. We recently reported the discovery of a new classes of intermittencies and pull-in instabilities. We will use the requested system to design, test, and characterize MEMS: - inertial sensors: gyroscopes, magnetic field sensors, gas sensors, and chemical sensors - actuators: deformable micromirrors, grating micromirrors, and micro tweezers It will allow us to test them in air and aqueous media as well as encapsulated in vacuum packaging. The sensors and actuators will be actuated electrically and sensed using the vibrometer. The typical test setup is made of a Signal Generator for drive signal generation, a signal amplifier, a vacuum or water test chamber where needed, and a Vibrometer for wide frequency-domain modal analysis. The former items are available in my laboratory and the latter item is being requested under this proposal.