Reducing ultrafast laser induced damage in commercial materials during machining of site-specific**targets

减少特定地点**目标加工过程中超快激光对商业材料造成的损伤

• 批准号: 522333-2018
• 负责人: Weck, Arnaud
• 金额: $ 1.82万
• 依托单位: University of Ottawa
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2018
• 资助国家: 加拿大
• 起止时间: 2018-01-01 至 2019-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=668318
• 关键词: Reducing; ultrafast; laser; induced; damage

Fibics Incorporated was established in early 1997 with the goal of developing applications of Focused Ion Beam (FIB) microscopy**in the fields of Metallurgy and Materials Science. Since then, Fibics has become a world authority on focused ion beams and**associated ion-solid interactions, FIB, and Scanning Electron Microscopy (SEM) applications. Focused Ion Beam (FIB) microscopy**can be considered a near-atomic-scale milling machines, capable of precise and rapid removal of material in a near-stress-free**manner using ballistic milling of ions. FIB systems work well to remove very small amounts of material, on the order of one to one**million cubic micrometers. Beyond this, it is necessary to pre-prepare the sample in some way, which typically includes**mechanical grinding or polishing, which usually result in unwanted damage to the material. Typical times to micromachine a**sample can range from a few hours to a whole day. Fibics, in collaboration with the University of Ottawa, will investigate the**potential of using ultrafast lasers to decrease the micromachining times by orders of magnitude in Fibics sample preparation**processes. Ultrafast lasers are known to have high material removal rates with minimal collateral damage to the surrounding**material (i.e. heat affected zone, defect formation, etc.). Various samples will be machined with the ultrafast laser at the University**of Ottawa and characterized for damage at Fibics. The results obtained at the end of the project will allow Fibics to assess whether**this ultrafast laser technology would be a viable asset in the context of Fibics activities.

Fibics Incorporated成立于1997年初，目标是开发聚焦离子束（FIB）显微镜 ** 在冶金和材料科学领域的应用。从那时起，Fibics已成为聚焦离子束和相关离子-固体相互作用，FIB和扫描电子显微镜（SEM）应用的世界权威。聚焦离子束（FIB）显微镜 ** 可以被认为是一种近原子级的铣床，能够使用离子的弹道铣削以接近无应力的方式精确快速地去除材料。FIB系统很好地工作，以去除非常少量的材料，在一至一百万立方微米的数量级。除此之外，有必要以某种方式预先制备样品，通常包括机械研磨或抛光，这通常会对材料造成不必要的损坏。微加工一个样品的典型时间可以从几个小时到一整天。Fibics与渥太华大学合作，将研究在Fibics样品制备 ** 过程中使用超快激光以减少数量级的微加工时间的潜力。已知超快激光器具有高材料去除率，对周围材料的附带损伤最小（即热影响区、缺陷形成等）。将在渥太华大学 ** 使用超快激光机加工各种样品，并在Fibics表征损伤。在项目结束时获得的结果将使Fibics能够评估这种超快激光技术在Fibics活动中是否是一种可行的资产。