Reducing ultrafast laser induced damage in commercial materials during machining of site-specific**targets

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Fibics Incorporated was established in early 1997 with the goal of developing applications of Focused Ion Beam (FIB) microscopy**in the fields of Metallurgy and Materials Science. Since then, Fibics has become a world authority on focused ion beams and**associated ion-solid interactions, FIB, and Scanning Electron Microscopy (SEM) applications. Focused Ion Beam (FIB) microscopy**can be considered a near-atomic-scale milling machines, capable of precise and rapid removal of material in a near-stress-free**manner using ballistic milling of ions. FIB systems work well to remove very small amounts of material, on the order of one to one**million cubic micrometers. Beyond this, it is necessary to pre-prepare the sample in some way, which typically includes**mechanical grinding or polishing, which usually result in unwanted damage to the material. Typical times to micromachine a**sample can range from a few hours to a whole day. Fibics, in collaboration with the University of Ottawa, will investigate the**potential of using ultrafast lasers to decrease the micromachining times by orders of magnitude in Fibics sample preparation**processes. Ultrafast lasers are known to have high material removal rates with minimal collateral damage to the surrounding**material (i.e. heat affected zone, defect formation, etc.). Various samples will be machined with the ultrafast laser at the University**of Ottawa and characterized for damage at Fibics. The results obtained at the end of the project will allow Fibics to assess whether**this ultrafast laser technology would be a viable asset in the context of Fibics activities.