Fabrication of 2D material devices using large-area manufacturable methods

拟议的研究计划涉及使用可制造方法制造二维材料（石墨烯类材料）器件。二维材料是晶体单层材料，其中最著名的是石墨烯。最近，其他二维材料，如单层硅（或硅烯）、锗（或锗烯）、磷（或磷烯）和二硫化钼，显示出了非凡的性能：高载流子迁移率（>200 cm2/Vs），理论载流子迁移率比它们的体对应物大几倍，可调谐的带隙由施加的垂直电场控制，高表面体积比，选择性气体检测电阻的各向异性变化，灵活性，顺磁和自旋电子性能。然而，目前文献中报道的设备将溶液中的2D材料从单晶衬底机械地转移到产生电接触的非导电衬底上，这一过程不可重复且不可制造。因此，需要创新开发制造友好的方法来制备二维材料器件。******在接下来的5年里，我的团队将使用可重复的、与硅制造工艺兼容的大面积技术来种植2D材料，以实现大规模生产。同时，我们将使用已建立的技术（剥离和化学气相沉积）制备二维材料器件，用于开发可调谐红外探测器，气体传感器，生物传感器，下一代集成电路和透明冲击/抗震性。二维材料的光学、电子、结构、机械、磁性和热性能将被表征，新发现的性能将用于开发新的应用。这项研究计划的长期目标是将我们实验室开发的二维材料设备商业化。******我的小组将操作和维护一个现有的簇沉积工具来制造2D材料器件。该系统配备了两个溅射沉积室和两个等离子体增强化学气相沉积（PECVD）室。一个PECVD腔室也将升级到能够从气相生长二维材料。集束工具系统的关键优势在于，在一个腔室中生长的2D材料可以被沉积在其他腔室的高k介电介质和金属层覆盖，这将是加拿大的一项独特能力。在腔室之间转移样品使我们能够避免工艺之间的杂质污染和不良氧化物形成，这是制造高性能设备的重要特征。特定应用的设备将在合作者的实验室设施中进行测试。拟议的研究计划将导致新发现的二维材料的材料特性，并使涉及工业合作的设备原型制造取得突破，这将对加拿大高科技部门产生直接影响。

The proposed research program involves the fabrication of 2D materials (graphene-like materials) devices using manufacturable methods. 2D materials are crystalline monolayer materials, the most famous of which is graphene. Recently, other 2D materials such as monolayer Si (or silicene), Ge (or germanene), P (or phosphorene), and MoS2 have shown extraordinary properties: high measured carrier mobility (>200 cm2/Vs), theoretical carrier mobility multiple times larger than their bulk counterpart, tuneable bandgap controlled by applied vertical electric field, high surface-volume ratio, anisotropic changes in resistance for selective gas detection, flexibility, and paramagnetic and spintronic properties. However, devices currently reported in literature mechanically transfer 2D materials in solution from a single crystal substrate, to a non-conducting substrate where electrical contacts are made, a process which is non-repeatable and not manufacturable. Therefore, innovation is required to develop manufacturing-friendly methods to prepare 2D material devices. ******In the next 5 years, my team will grow 2D materials using repeatable, large-area techniques which are compatible with Si manufacturing processes to enable mass-production. In parallel, we will prepare 2D material devices using established techniques (exfoliation and chemical vapor deposition) for developing tuneable infrared detectors, gas sensors, biosensors, next-generation integrated circuits, and transparent impact/shock resistance. The optical, electronic, structural, mechanical, magnetic, thermal properties of 2D materials will be characterized and newly discovered properties will be used to develop new applications. The long-term objective of this research program is to commercialize 2D material devices developed in our lab.******My group will operate and maintain an existing cluster deposition tool to fabricate 2D material devices. This system is equipped with two sputtering deposition chambers and two plasma-enhanced chemical vapor deposition (PECVD) chambers. One PECVD chamber will also be upgraded to be capable of 2D material growth from vapor phase. The key advantage of a cluster tool system is that 2D materials grown in one chamber can be covered with a high-k dielectric and metal layer deposited in other chambers, which would be a unique capability in Canada. Transferring samples between chambers allows us to avoid impurity contamination and undesirable oxide formation between processes, an important feature for making high-performance devices. Application-specific devices will be tested in the lab facilities of collaborators. The proposed research program will lead to newly discovered material properties of 2D materials, and enable breakthroughs in device prototype fabrication involving industrial collaborations, which will have a direct impact on the Canadian high tech sector.