Simplified thermal plasma model for Excelitas's LPPS high-pressure high-brightness light bulbs

加拿大Excelitas正在开发一种新的高强度光源产品线，用于半导体加工和高分辨率成像。光源将强激光的能量耦合到一个包含气体的小高压腔中，以产生热等离子体，该等离子体负责在可见光范围内大量发射光。灯泡会受到强烈的热应力和机械应力，导致使用寿命有限。Excelitas的工程师已经获得了一系列重要的性能数据和专业知识，但缺乏使他们能够充分了解当前产品并将极限推向更高性能的设计工具(模型)。这一合作项目旨在通过结合来自麦吉尔大学等离子体处理实验室和加拿大Excelitas的互补专业知识来开发这样的工具。

Excelitas Canada is developing a new high-intensity light source product line for application in semiconductor processing and high-resolution imaging. The light source couples the energy of an intense laser into a small high-pressure cavity containing a gas, for the production of a thermal plasma responsible for the copious emission of light in the visible range. The bulb is subject to strenuous thermal and mechanical stresses, leading to limited lifetime. Excelitas engineers have acquired a significant set of performance data and expertise, but the access to a design tool (model) allowing them to fully understand the current products and to push the limit towards higher performances is lacking. This collaborative project aims the development of such a tool by combining complementary expertises from the Plasma Processing Laboratory of McGill University and Excelitas Canada.