Simplified thermal plasma model for Excelitas's LPPS high-pressure high-brightness light bulbs
Simplified thermal plasma model for Excelitas's LPPS high-pressure high-brightness light bulbs
批准号:
539031-2019
负责人:
Coulombe, Sylvain
金额:
$1.82万
依托单位:
依托单位国家:
加拿大
项目类别:
Engage Grants Program
财政年份:
2019
资助国家:
加拿大
项目状态:
已结题
起止时间:
2019-01-01 至 2020-12-31
中文摘要
Excelitas Canada正在开发一种新的高强度光源产品线,用于半导体加工和高分辨率成像。光源将强激光的能量耦合到包含气体的小高压腔中,用于产生热等离子体,该热等离子体负责在可见光范围内发射大量光。灯泡会受到剧烈的热应力和机械应力,导致寿命有限。Excelitas的工程师已经获得了一组重要的性能数据和专业知识,但缺乏设计工具(模型),使他们能够充分了解当前的产品,并将极限推向更高的性能。该合作项目旨在通过结合麦吉尔大学等离子体处理实验室和加拿大Excelitas的互补专业知识来开发这样一种工具。
英文摘要
Excelitas Canada is developing a new high-intensity light source product line for application in semiconductor processing and high-resolution imaging. The light source couples the energy of an intense laser into a small high-pressure cavity containing a gas, for the production of a thermal plasma responsible for the copious emission of light in the visible range. The bulb is subject to strenuous thermal and mechanical stresses, leading to limited lifetime. Excelitas engineers have acquired a significant set of performance data and expertise, but the access to a design tool (model) allowing them to fully understand the current products and to push the limit towards higher performances is lacking. This collaborative project aims the development of such a tool by combining complementary expertises from the Plasma Processing Laboratory of McGill University and Excelitas Canada.
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