Surface Debye temperature as a probe for defects in thin films

OCI真空微工程公司成立于1990年，是加拿大唯一一家设计和制造低能电子衍射(LEED)系统的公司，也是该领域的全球领先公司。OCI Vacuum正在考虑扩展LEED仪器的功能，将德拜温度测量包括到工具包中。使用LEED作为外延薄膜器件沉积过程中的诊断工具，可以在制造过程中优化器件制造参数，并使在各种器件生长系统中实施LEED成为可能。在这项由西方大学Goncharova教授的团队和OCI Vacuum合作的项目中，我们将探索对许多设备至关重要的近表面缺陷表征与来自LEED测量的德拜温度测量之间的关系。将讨论几个问题：制作一系列宽禁带和窄禁带半导体(Si、Ge、AlN)和绝缘体(Al_2O_3)的缺陷校准标准，将缺陷密度与电子衍射图和强度相关联；确定结构的化学和热稳定性；以及将实验结果与现有理论模型进行比较。该项目将开发一种强大的方法来在各种外延薄膜生长工具中实施LEED，从而能够制造红外探测器、磁传感器和光学传感器等器件。OCI LEED系统能力的增强将导致销售额的增加。

OCI Vacuum Microengineering Inc has been in business since 1990 and is the only Canadian designer and manufacturer of Low Energy Electron Diffraction (LEED) systems, and is a worldwide leading company in the field. OCI Vacuum is considering to expand LEED instrument capabilities to include Debye temperature measurements to a toolset. Using LEED as a diagnostic tool during deposition of epitaxial thin film devices allows optimization of device fabrication parameters during manufacturing, and makes it possible to implement LEED at various device growth systems. In this Engage grant, a collaborative project between Prof. Goncharova's group at Western University and OCI Vacuum, we will explore the relationship between near-surface defect characterization that is critical for many devices, and measurements of Debye temperature coming from LEED measurements. Several issues will be addressed: manufacturing defect calibration standards for a range of wide- and narrow-bandgap semiconductors (Si, Ge, AlN), and insulators (Al2O3), correlating defect densities with electron diffraction patterns and intensities; determining chemical and thermal stability of the structures; and comparing experimental results with existing theoretical models. This project will develop a robust methodology to implement LEED in various epitaxial thin film growth tools, enabling fabrication of devices such as infrared detectors, magnetic and optical sensors, and many others. The enhanced capability of OCI LEED systems will lead to increased sales.