Surface Debye temperature as a probe for defects in thin films

表面德拜温度作为薄膜缺陷的探针

• 批准号: 543992-2019
• 负责人: Goncharova, Lyudmila
• 金额: $ 1.82万
• 依托单位: University of Western Ontario
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2019
• 资助国家: 加拿大
• 起止时间: 2019-01-01 至 2020-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=681188
• 关键词: Surface; Debye; temperature; probe; defects

OCI Vacuum Microengineering Inc has been in business since 1990 and is the only Canadian designer and manufacturer of Low Energy Electron Diffraction (LEED) systems, and is a worldwide leading company in the field. OCI Vacuum is considering to expand LEED instrument capabilities to include Debye temperature measurements to a toolset. Using LEED as a diagnostic tool during deposition of epitaxial thin film devices allows optimization of device fabrication parameters during manufacturing, and makes it possible to implement LEED at various device growth systems. In this Engage grant, a collaborative project between Prof. Goncharova's group at Western University and OCI Vacuum, we will explore the relationship between near-surface defect characterization that is critical for many devices, and measurements of Debye temperature coming from LEED measurements. Several issues will be addressed: manufacturing defect calibration standards for a range of wide- and narrow-bandgap semiconductors (Si, Ge, AlN), and insulators (Al2O3), correlating defect densities with electron diffraction patterns and intensities; determining chemical and thermal stability of the structures; and comparing experimental results with existing theoretical models. This project will develop a robust methodology to implement LEED in various epitaxial thin film growth tools, enabling fabrication of devices such as infrared detectors, magnetic and optical sensors, and many others. The enhanced capability of OCI LEED systems will lead to increased sales.

OCI真空微工程公司自1990年以来一直在经营，是加拿大唯一的低能电子衍射（LEED）系统的设计者和制造商，是该领域的全球领先公司。OCI Vacuum正在考虑扩展LEED仪器的功能，将德拜温度测量纳入工具集。在外延薄膜器件的沉积期间使用LEED作为诊断工具允许在制造期间优化器件制造参数，并且使得可以在各种器件生长系统中实施LEED。在这个Engage资助项目中，Goncharova教授在西方大学和OCI Vacuum之间的合作项目，我们将探索对许多设备至关重要的近表面缺陷表征与来自LEED测量的德拜温度测量之间的关系。几个问题将得到解决：制造缺陷校准标准的一系列宽和窄带隙半导体（硅，锗，氮化铝）和绝缘体（氧化铝），相关的缺陷密度与电子衍射图案和强度;确定化学和热稳定性的结构;和比较实验结果与现有的理论模型。该项目将开发一种强大的方法，在各种外延薄膜生长工具中实施LEED，从而能够制造红外探测器，磁性和光学传感器等设备。 OCI LEED系统的增强能力将导致销售增加。