Smart nanostructured optical coatings prepared by pulsed plasma techniques

*为了应对光学涂层领域的科学和技术挑战，申请人提议使用低压脉冲管理等离子体工艺(PMPP)在低温下对薄膜生长进行尖端研究，以制备具有定制的电致变色、热致变色、等离子体和其他适合于智能混合滤光器(SHOF)实现的特性的结构控制的智能(主动)光学涂层(SOCs)。它的目的是提高知识和培训HQP，同时专注于以下内容：*a)使用PMPP混合方法，我们计划探索从空心阴极同时结合等离子体增强化学气相沉积的脉冲磁控溅射。主要的兴趣将集中在由放电参数的受控脉冲调制以及气体动力学提供的新的可能性，以合成具有受控密度、纳米结构和孔隙率的均匀薄膜形式的活性材料，以及包含明确定义的活性纳米颗粒和/或纳米孔的纳米复合材料。*b)将在完整的多层SHOFs中集成纳米结构智能光学涂层，目的是展示适用于安全(防伪)、气体和蒸汽传感器、用于能量控制和节约的智能窗口、*该计划涵盖从材料和光学镀膜设计到工艺开发的所有步骤，以及先进应用的器件制造和测试；因此，它代表了基础研究和应用研究之间非常有吸引力的平衡，具有强大的技术影响潜力。

***In response to the scientific and technological challenges in the area of optical coatings, the applicant proposes to perform cutting-edge research on the thin film growth at low temperatures using low pressure, pulse-managed plasma processes (PMPP) to fabricate structurally-controlled smart (active) optical coatings (SOCs) with tailored electrochromic, thermochromic, plasmonic and other properties suitable for their implementation in smart hybrid optical filters (SHOF). It aims at advancing knowledge and training HQP while focusing on the following:******a) Using the PMPP hybrid approach, we plan to explore pulsed magnetron sputtering from a hollow cathode simultaneously combined with plasma enhanced chemical vapor deposition. Main interest will be devoted to the new possibilities offered by controlled pulse modulation of the discharge parameters as well as of the gas dynamics to synthesize active materials in the form of homogeneous films with controlled density, nanostructure and porosity, and nanocomposites containing well-defined active nanoparticles and/or nanopores.******b) Integration of the nanostructured smart optical coatings within complete multilayer SHOFs will be performed with the aim to demonstrate device functions suitable for applications in the areas of security (anti-counterfeiting), gas and vapor sensors, smart windows for energy control and saving, and others.******The program covers all steps leading from material and optical coating design to process development, as well as device fabrication and testing for advanced applications; as such, it represents a very attractive balance between fundamental and applied research, with a strong potential for technological impact.********