Smart nanostructured optical coatings prepared by pulsed plasma-based techniques

采用脉冲等离子体技术制备的智能纳米结构光学涂层

• 批准号: RGPIN-2020-06937
• 负责人: Martinu, Ludvik
• 金额: $ 3.64万
• 依托单位: École Polytechnique de Montréal
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2022
• 资助国家: 加拿大
• 起止时间: 2022-01-01 至 2023-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=754593
• 关键词: Smart; nanostructured; optical; coatings; prepared

The field of coating and surface engineering technology is evolving very rapidly thanks to the synergy between the progress in materials science, development of new fabrication processes and ever increasing technical, environmental and economic challenges. Moreover, the range of applications of OCs continues to broaden, offering attractive opportunities in areas such as telecommunications, displays, energy saving, sensing and environmental control, lasers, lighting, instrumentation, consumer electronics, health-related devices, document security and numerous others.      The strive to develop new materials with complex nanostructures on 2D/3D levels has resulted in the discovery of new optical effects that could find use in multiple applications such as smart (active) optical coating (SOC) systems and functional metasurfaces (FMS) with tailored electrochromic, thermochromic, plasmonic, selective catalytic and other properties suitable for their implementation in smart multifunctional optical filters (SOFs).      In response to the challenges in the area of OC described above, the proposed program will advance cutting edge research on the growth of thin films and modification of surfaces using low pressure, pulse-managed plasma processes (PMPP) to fabricate structurally controlled SOCs and FMS with tailored properties, suitable for their use in SOFs. Specifically, it will focus on the following aspects:      a) Using the PMPP, such as high power impulse magnetron sputtering (HiPIMS), we plan to explore film growth in tandem with plasma enhanced chemical vapor deposition (PECVD), Plasma Enhanced Atomic Layer Deposition (PE-ALD) and Glancing Angle Deposition (GLAD) for their potential synergistic effects. Main interest will be devoted to the new possibilities offered by controlled pulse modulation of the discharge parameters and of the plasma-surface interactions to synthesize active and passive materials in the form of homogeneous films with controlled density, nanostructure, crystallinity and porosity, as well as optical nanostructures comprising well defined surface patterns, and nanoparticles obtained by gas phase aggregation.      b) Integration of the nanostructured smart OC within complete multilayer SOFs will be performed with the aim to demonstrate device functions suitable for applications in the areas of energy control and saving (smart windows and smart radiators), security (anticounterfeiting and authentication), gas and vapor sensors, and others. The program is based on the holistic approach to functional coatings and surface engineering, that includes all necessary steps to close the logistic loop involving four essential components, namely (i) optical coating design, (ii) process development including diagnostics and monitoring, (iii) materials synthesis, and (iv) materials and device characterization and functional testing.

由于材料科学的进步、新制造工艺的发展以及不断增加的技术、环境和经济挑战之间的协同作用，涂层和表面工程技术领域正在迅速发展。此外，OCs的应用范围不断扩大，在电信、显示、节能、传感和环境控制、激光、照明、仪器仪表、消费电子、健康相关设备、文件安全等众多领域提供了有吸引力的机会。在2D/3D水平上开发具有复杂纳米结构的新材料的努力导致了新的光学效应的发现，这些效应可以在多种应用中找到用途，例如智能（有源）光学涂层（SOC）系统和具有定制电致变色、热致变色、等离子体、选择性催化和其他特性的功能超表面（FMS），适合在智能多功能光学滤光片（SOFs）中实现。为了应对上述OC领域的挑战，该计划将推进薄膜生长和表面改性的前沿研究，使用低压、脉冲管理等离子体工艺（PMPP）制造具有定制性能的结构控制soc和FMS，适合用于SOFs。具体而言，我们将重点关注以下几个方面：a)利用PMPP，如高功率脉冲磁控溅射（HiPIMS），我们计划探索薄膜生长与等离子体增强化学气相沉积（PECVD），等离子体增强原子层沉积（PE-ALD）和掠角沉积（GLAD）的协同效应。主要兴趣将集中在通过控制脉冲调制放电参数和等离子体表面相互作用来合成具有控制密度、纳米结构、结晶度和孔隙度的均匀薄膜形式的活性和被动材料，以及包含明确表面图案的光学纳米结构，以及通过气相聚集获得的纳米颗粒。b)将在完整的多层SOFs中集成纳米结构智能OC，目的是展示适用于能源控制和节能（智能窗户和智能散热器）、安全（防伪和认证）、气体和蒸汽传感器等领域应用的设备功能。该计划基于功能性涂层和表面工程的整体方法，包括所有必要的步骤，以关闭涉及四个基本组成部分的物流循环，即(i)光学涂层设计，（ii）包括诊断和监测的工艺开发，（iii）材料合成，以及（iv）材料和器件表征和功能测试。