Developing a hybrid waterjet-laser micromachining technology and associated process models for damage-free fabrication of silicon substrates

开发混合水射流-激光微加工技术和相关工艺模型，用于硅基板的无损制造

• 批准号: DP110100690
• 负责人: Prof Jun Wang
• 金额: $ 26.69万
• 依托单位: The University of New South Wales
• 依托单位国家: 澳大利亚
• 项目类别: Discovery Projects
• 财政年份: 2011
• 资助国家: 澳大利亚
• 起止时间: 2011-01-01 至 2014-12-31
• 项目状态: 已结题
• 来源: https://dataportal.arc.gov.au/RGS/Web/Grants/DP110100690
• 关键词: Developing; hybrid; waterjet; laser; micromachining

This hybrid micromachining technology will make it possible for damage-free, fast micro-fabrication of high-integrity devices such as high performance silicon solar cells. It will open new directions for the Australian manufacturing industry in micro-technologies. The environmental and economic benefits to the nation will be highly significant.

这种混合微加工技术将使高完整性器件（如高性能硅太阳能电池）的无损伤、快速微加工成为可能。它将为澳大利亚制造业在微技术方面开辟新的方向。对国家的环境和经济效益将是非常显著的。