Design and fabrication of a terahertz time domain vector network analyzer for material and device characterization

该提案的重点是光电太赫兹片上系统（TSoC）时域矢量网络分析仪（TSoC-TDVNA）的开发和制造。TSoC-TDVNA是一种测量电子元件和材料的复杂散射参数的设备，最高可达3- 4 THz。拟议的研究计划的目标是扩大我们以前的工作，并开发TSoC-TDVNA成为一个使能，创新和必要的平台。为了实现这一目标，我们将开始通过缩放微波/毫米波组件到太赫兹范围，以展示独特的功能。我们先前的工作开始了这个过程，但集中在测量传输幅度（即，标量网络分析仪），其提供了有价值的信息，但是该方法缺乏表征诸如有效介电常数和磁导率等重要参数所必需的相位信息。拟议的TSoC-TDVNA将固有地解决相位信息，并扩展当前系统的能力。这项任务面临着许多挑战（设计，制造和实验），需要新的解决方案，以保持高光谱分辨率和动态范围的超宽带系统。这项研究计划将产生重大影响，因为发明了一种低成本的太赫兹带宽矢量网络分析仪，这种设备目前还不存在。该提案的另一个关键组成部分是促进多学科的THz研究。我们将把微流控通道集成到TSoC--TDVNA平台中，以创造独特的途径来促进与化学、生物和医学部门的合作。我们将该设备称为TSoC-微流体测试台或TSoC-µFTB。TSoC-µFTB将集成并简化标准THz光谱系统固有的复杂性。例如，许多液体在THz频率下具有高度吸收性，因此需要仔细控制样品相互作用区域（± 5 µm）以实现最佳灵敏度-所提出的TSoC-µFTB为这个问题提供了一种新的解决方案。

This proposal focuses on the development and fabrication of an optoelectronic terahertz system-on-chip (TSoC) time--domain vector network analyzer (TSoC--TDVNA). The TSoC--TDVNA is a device that measures the complex scattering parameters of electronic components and materials up to 3--4 THz. The objective of the proposed research program is to expand upon our prior work and develop the TSoC--TDVNA into an enabling, innovative, and essential platform. To achieve this goal, we will begin by scaling microwave/mm--wave components into the THz range to demonstrate unique functionality. Our prior work began this process but focused on measuring the transmission magnitude (i.e., a scalar network analyzer) which provided valuable information, but the method lacked the phase information necessary to characterize important parameters such as effective permittivity and permeability. The proposed TSoC-TDVNA will inherently resolve phase information and extend the capabilities of current systems. This task faces many challenges (design, fabrication, and experimental) which require novel solutions to retain high spectral resolution and dynamic range in an ultra--wideband system. This research program will have significant impact due to the invention of a low-cost THz-bandwidth vector network analyzer, a device which currently does not exist. Another key component of this proposal is to promote multidisciplinary THz research. We will integrate microfluidic channels into TSoC--TDVNA platform to create unique avenue to foster collaboration with chemistry, biology, and medical departments. We term this device a TSoC-microfluidic test bench or TSoC-µFTB. The TSoC-µFTB will integrate and simplify complexities which are inherent to standard THz spectroscopy systems. For example, many liquids are highly absorptive at THz frequencies, thus careful control of sample interaction region (± 5 µm) is necessary to achieve optimal sensitivity - the proposed TSoC-µFTB provides a novel solution to this issue.