Site-selective fabrication of quantum nanostructures

量子光子集成电路（QPIC）对于光量子计算、量子加密、片上量子通信和芯片级量子系统、量子传感等一系列量子信息和光子技术至关重要。然而，迄今为止，还没有关于在单个芯片上集成有源和无源量子元件的报道。以往的研究主要集中在SPS与低损耗SiN/LiNbO3或绝缘体平台（SOI）的异质集成上。然而，使用不同材料的异质集成存在高光损耗和集成复杂性的问题。因此，在同一材料平台的低损耗WG上开发按需SPS单片集成在很大程度上解决了上述瓶颈。SPS与低损耗WG的同质集成将是必不可少的第一步，对于实现多功能和全功能集成QPIC至关重要。iii -氮化物材料表现出独特的性能，使它们有可能用于构建高效的QPIC。该合作项目旨在在单一平台上制造和演示所有iii族氮化物有源和无源量子元件的无缝集成。为此，利用他们互补的专业知识、技术诀窍、设施和密集的协同作用，申请人（Maher博士和Arafin博士）的目标是提供一个高效和可扩展的平台，在室温下使用技术上可行的结构制造确定性的所有iii -氮化物QPIC。该项目将对整个量子科学技术界和量子技术的广泛商业化具有价值。这将是量子光子集成电路发展的一个重要里程碑，具有广泛的量子应用前景。通过培养量子科学和技术领域的高素质人才，目标成果将使加拿大量子产业受益。最终。它还将在学术界和工业界创造就业机会，并将有助于加强加拿大在新兴量子领域的领先地位。

Quantum photonic integrated circuit (QPIC) is critical for a range of quantum information and photonic technologies ranging from optical quantum computing, quantum encryption, on-chip quantum communication and chip scale quantum systems, quantum sensing etc. To date, however, there has been no report on monolithic integration of active and passive quantum elements on a single chip. Previous studies primarily focused on heterogeneous integration of SPS with low-loss SiN/LiNbO3 or silicon on insulator platform (SOI). However, heterogenous integration using dissimilar materials suffers from high optical loss and integration complexity. Therefore, the development of monolithic integration of on-demand SPS on a low-loss WG using same material platform largely solve the afore-mentioned bottleneck. Homogenous integration of SPS with low-loss WG will be the essential first step and crucial to enable versatile and fully functional integrated QPIC. III-nitride materials exhibit unique properties making possible to use them to build efficient QPIC. This collaborative project aims to fabricate and demonstrate seamless integration of all group III-nitride active and passive quantum components in a single platform. To this end, leveraging their complementary expertise, know-how, facilities and intensive synergy, the applicants (Pr. Maher and Dr. Arafin) aim to deliver an efficient and scalable platform for making deterministic all III-nitride QPIC using technologically feasible structure at room temperature. The project will be valuable for the entire quantum science and technology community and the widespread commercialization of quantum technologies. It will be a significant milestone towards the development of quantum photonic integrated circuits for a broad range of quantum applications. The targeted outcomes will benefit the Canadian quantum industry through the training of highly qualified personnel in the fields of quantum science and technology. Eventually. It will also create careers in academia and industry, as well as will contribute to strengthening Canada among the leading nations in the emerging quantum sector.