基于溅射法快速沉积YBCO带材超导层研究

针对第二代高温超导带材实用化遇到的成本、效率、性能制约因素，本项目基于磁控溅射技术的YBCO超导层快速制备，即先沉积YBaCu非晶薄膜在制备了LaMnO3缓冲层的IBAD-MgO基底，后将非晶薄膜在高温低氧区和高氧区快速退火形成超导薄膜。主要研究以下内容：（1）合金靶溅射后氧化退火制备YBCO超导层，明确溅射工艺参数与沉积薄膜的物相、微观形貌、超导性能间的关联；（2）研究YBCO前驱体薄膜氧化退火过程中的超导层外延机理，，揭示薄膜的物相演变规律、二次相分布情况；（3）研究基于溅射法掺杂Re元素制备超导层钉扎中心形成机制以及钉扎作用机理。

For the second generation of high temperature superconducting strip practical application of the cost, efficiency and superconductor performance, this project carried out a novel technology, which is based on magnetron sputtering, for preparing of YBCO superconducting layer. Constituting metals such as Y, Ba and Cu will be deposited on LaMnO3 buffered IBAD-MgO templates at low temperatures. Then, the amorphous precursor film will be transferred to a hot zone of a tube furnace with lower oxygen pressure zone and subsequently moved into higher oxygen pressure zone for conversion into the YBCO phase. The main content contains several points as below:(1)fabricate YBCO superconducting layers through sputtering and post-annealing technology, And find out the relationship between the sputtering parameters and crystalline structure, morphology and superconductor properties of the deposited films;(2)study the epitaxial growth mechanism of superconducting layers, get results to investigate the phase formation process and impurity phase distribution;(3) Pinning center formation mechanism and the pinning mechanism will be studied by doping Re element base on sputtering technology.