制备L10结构的FePt纳米颗粒大尺度有序点阵,一直以来都被视为进一步突破高密度数据存储超顺磁瓶颈的理想方法。然而FePt纳米颗粒形成铁磁有序点阵过程中，高温退火导致颗粒团聚、有序点阵结构破坏的问题，成了急需跨越的障碍。本课题将利用创新的工艺技术和原理，一方面将原子层沉积技术（ALD）与FePt纳米颗粒的自组装相结合，原位施加外磁场来实现对FePt纳米颗粒有序薄膜的取向控制和磁性能调控，另一方面，将纳米压印与ALD技术相结合，探索ALD在制备大尺度有序FePt/CoPt磁纳米点阵列的可行性。从理论和实验上揭示微观结构与磁性能之间的内在联系，为人工设计调控磁性金属纳米结构的性能提供科学依据，为ALD在图案型磁存储介质上的应用，提供提供一种富有竞争力的方案，包括关键材料体系和制备技术上的支持。该课题的实施，对发展我国具有自主知识产权的超高密度（>1Tbit每平方英寸）磁存储器件，具有重要意义。

The large-scale ordered L10 FePt nano-arrays with high magnetocrystalline anisotropy have been regarded as an attractive approach to circumvent the superparamagnetism problem in high density data storages. However, in order to obtain ferromagnetic FePt arrays, the high temperature heat-treatment is necessary, which may cause FePt aggregation and sintering, and decrease the particle positional order. This work will focus on the fabrication and magnetic properties of ultra-high density FePt ordered nano-arrays by means of novel atomic layer deposition (ALD) processing and mechanism. One hand, the crystallographic orientation controls and magnetic property tuning are realized by the combination of ALD-capping layer and self-assembled FePt nanoparticles under in-situ applied magnetic field. On the other hand, it is explored to achieve large area patterned chemically ordered FePt nano-arrays by means of the synergic role of nanoimprint lithography and ALD. The experimental and theoretical results will reveal the relationship between microstructure and magnetic properties and provide the scientific fundamentals for artificial design and tuning of magnetic FePt/CoPt nano-arrays. One competitive and potential project on ALD technique applications in patterned recording media will be proposed, including the key materials system and fabrication processing. In conclusion, this work is of importance and significance to develop the ultrahigh areal density (>1Tbit/inch2) patterned magnetic storage devices with China intellectual property rights.