电磁加热式MOCVD反应室温度场的研究

传统电磁加热式金属有机物化学气相沉积（MOCVD）反应室设计的核心难点之一是衬底温度分布不均匀性问题，特别是对于大尺寸（加热衬底直径十二英寸）的反应室，由于感生电流的趋肤效应，衬底温度分布不均匀性这一问题更为突出。摒弃单一依赖于实验的研究方法，通过对反应室建立数学模型，运用有限元计算方法，研究在电磁加热条件下MOCVD反应室内部、基座和衬底的温度场分布规律，对影响反应室内部温度场分布的反应室结构、基座材料、形状和结构、线圈导线的形状和线圈排布方式以及外加电流参数等关键因素进行深入研究，揭示衬底温度分布均匀性与这些因素的内在关系，最终通过数值计算分析，设计出十二英寸衬底的立式电磁加热式反应室，并对其加热结构和外加电流参数作进一步的优化，提高衬底温度分布的均匀性，为十二英寸电磁加热式MOCVD设备研制提供技术支撑。

In the conventional metal organic chemical vapor deposition (MOCVD) reactor with induction heating, the temperature distribution nonuniformity in the substrate is serious, due to the skin effect, especially for the large-size (the diameter of the heated substrate is 12 inches) reactor, this problem is particularly significant.By building the mathematical model of the MOCVD reactor heated by induction without only using the methods of the dependence on experimental research, the temperature distribution laws of the reactor, the susceptor and the substrate are explored by using the finite element methods. Deeper investigation is made about the structure of the reactor, the material, structure and the shape of the suscptor, the coil distributions and the wire structure of the coils and the applied current parameters which affect the temperature distribution of the substrate and the susceptor, aimed at clarifying the intrinsic relationship between these factors and the uniformity of temperature distribution in the substrate. By using the numerical analysis for the temperature field in the reactor, the vertical reactor for heating the 12-inch substrate by induction is designed.The heating structure and the applied current parameters are optimized to improve the uniformity of the temperature distribution in the substrate, which provides a theoretical basis for developing this MOCVD reactor heated by induction.