用于水体重金属离子检测的LTCC无源无线微流控传感器研究

有毒重金属离子会对水环境和人体健康造成严重危害，研究无源无线、低成本、可快速实时获取检测结果的传感器是当前水体重金属离子检测的前沿方向。凭借在三维微流道构建和微波无源集成方面的独特优势，低温共烧陶瓷（LTCC）技术有望成为获得无源无线微流控传感器的新途径。为了解决现有LC电磁谐振式无源无线传感器Q值低，检出限受限的问题，本项目提出了高Q值基片集成波导（SIW）谐振器-缝隙天线-微流道一体化集成的微波反射式无源无线传感原理，将滤波器耦合矩阵综合方法引入传感器设计优化；基于自主低损耗LTCC材料和无牺牲层填充微流道构建技术制备传感器；通过高分辨信号提取技术和主成分分析法，研究传感器对不同种类和浓度重金属离子的无线电磁信号响应规律；结合电磁-流体耦合模拟计算及介电性能测试，揭示水体重金属离子的微波介电响应机理，为LTCC无源无线微流控传感器在高灵敏度无线液体检测中的实际应用奠定科学和技术基础。

The toxic heavy metal ions can cause serious harm to the water environment and human health. The development of emerging passive wireless sensor with low cost and rapid detection for the heavy metal ions in water is cutting edge research. Low temperature co-fired ceramic (LTCC) technology is considered as a new route to obtain passive wireless microfluidic sensors, due to its feasibility for the fabrication of three-dimensional microchannel structures with embedded microwave circuits. To overcome the detection limit of the LC sensor with low Q value, this project proposed a passive wireless microfluidic sensor based on microwave backscattering through integration of substrate integrated waveguide (SIW), slot antenna and microfluidic. The coupling matrix synthesis method for filter design will be used for the design of the proposed sensor. The sensor will be fabricated using a homemade low loss LTCC material and special lamination process without any sacrificial material. The influence of different kinds and concentrations of heavy metal ions on the wireless signal will be investigated through high resolution signal extraction and principal component analysis methods. The electromagnetic- fluidic coupling simulation and the measurements of dielectric properties will also be carried out. The microwave dielectric response mechanism of heavy metal ions in water would be clarified through the comprehensive study of this project, which would promote the practical applications of the LTCC passive wireless microfluidic sensor.