基于LTCC的高温无源无线压力/温度集成传感器研究

低温共烧陶瓷（LTCC）技术在电磁谐振式高温压力传感器中的应用研究引起了无线传感器研究领域的广泛关注。针对LTCC高温压力传感器研究中存在的温度交叉敏感、灵敏度受限以及压力/温度难以集成测量等问题，本项目从LTCC基板材料研究出发，提出采用微晶玻璃系LTCC材料作为压力敏感膜、PTC厚膜热敏材料作为LC谐振天线电极的研究思路。以复合材料的有效介质理论为基础，通过玻璃组分设计和烧结工艺优化，研究并获得低杨氏模量、高介电温度稳定的LTCC压力敏感膜材料，实现与PTC厚膜及银电极等异质材料的匹配共烧。设计了电感解耦的双LC谐振天线，结合有限元模拟计算，揭示其在压力和温度场下的电磁调谐规律，以此指导压力/温度集成的无源无线LTCC传感器的制备，并进行600℃高温下的压力和温度的敏感特性研究，为可在高温恶劣环境下稳定工作的多参数集成无源无线LTCC传感器的研制奠定坚实的理论和技术基础。

The application of low temperature co-fired ceramic (LTCC) technique in LC resonant high temperature pressure sensors has drawn much attention in the wireless sensor research field. To solve the problems coming up in developing LTCC based passive wireless LC high temperature pressure sensor, such as serious temperature cross sensitivity, sensitivity constraint and unable to realize pressure/temperature simultaneous measurement, this project proposed to develop high performance pressure sensitive film using glass-ceramic based LTCC materials and use positive temperature coefficient (PTC) thick film as temperature sensitive LC resonant antenna electrode material. The pressure sensitive glass-ceramic with low Young’s modulus and high temperature stability of dielectric constant will be developed based on the effective medium theory of composites. PTC thick film will also be co-firable with the glass-ceramic LTCC material. The decoupling double LC resonant antennas are designed by the finite element analysis method. The integrated pressure and temperature LTCC sensor will be developed according to the simulated results. The pressure and temperature sensing features of the developed LTCC sensors under 600℃ would be clarified by analyzing the variations of impedance and resonant frequency. The achievements of this project will provide important principle and mechanism for developing multi-parameters integrated passive wireless LTCC sensor, which could work stably in high temperature harsh environment.