随着柔性电子技术及物联网技术的飞速发展，柔性气体传感器将在智能化、便携化及可穿戴设备中具有广泛的应用前景。本项目将利用石墨烯对气体分子独特的敏感特性、高迁移率、透明柔性及可实现柔性集成的特点，结合氧化锌多级纳米结构，构建石墨烯功能化敏感薄膜，提出并设计基于石墨烯敏感沟道的新型柔性气体传感器结构。通过材料与器件的模拟与仿真，建立并完善基于石墨烯纳米复合结构的柔性气体传感器理论模型，深入探讨气体分子在石墨烯纳米复合材料中的响应动力学过程及由此引起的载流子输运行为的变化规律，进一步揭示石墨烯纳米复合柔性气体传感器敏感机理与调控方法；研究并优化石墨烯与ZnO多级纳米结构的复合方法及其在柔性衬底上的成膜工艺；探索与CMOS工艺兼容的器件柔性化关键技术及其制备方法，最终获得具有高灵敏度和快速响应的石墨烯柔性气体传感器件，为石墨烯在柔性气体传感器中的应用提供一种可行的研究思路和实现途径。

With the rapid development of flexible electronic technology and internet of things, flexible gas sensors show a broad application prospects in intelligent, portable and wearable devices. In our project, we present a module of new flexible gas sensor structure based on graphene-sensitive channel. The graphene will be used for its excellent characteristics in terms of high mobility, transparency, flexibility, low-cost and compatibility with flexible integrated circuits, ZnO hierarchical nanostructure will be combined with graphene to prepare functionalized graphene-sensitive film. We will establish and optimize the theoretical model of graphene nanocomposites based flexible gas sensor through the simulation and modeling of materials and devices, and thoroughly investigate the response of gas molecules in the dynamic process within graphene nanocomposite materials, and then study the change of carrier transport behaviors in the sensitive tunnel. The sensitive mechanism about graphene nanocomposites based flexible gas sensor will be further revealed. The composite method of graphene and ZnO hierarchical nanostructure as well as the film preparation processes on the flexible substrate will be studied and optimized. The key technology and growth processes compatible with CMOS technology will also be explored. Finally, the graphene based flexible gas sensor with high sensitivity and fast response will be fabricated, providing research methods and directions in the graphene based flexible gas sensor applications.