硅微旋转曲面壳形陀螺受现有微纳工艺条件的限制，很难实现理想的曲面壳体，创新的误差自校准技术是解决该问题的有效途径。为此，本项目开展一种锁频自校准Sigma-Delta测控机理及其单芯片集成技术的研究。首先，基于曲面壳体形状、尺寸和工艺的研究建立陀螺非理想电学物理模型，针对壳形谐振子非对称性误差，寄生耦合效应、量化噪声和电噪声等建立Sigma-Delta系统噪声、非线性模型，并进行多目标协同优化；其次，通过闭环反馈失效、信号谐波失真、噪声泄漏和频率混叠等机理的研究，解决自驱动锁频与自校准Sigma-Delta测控等关键科学问题；最后，开展半球壳陀螺与电路的同平台仿真与优化，结合数模混合协同设计理论，开展代码验证转移至CMOS单芯片集成方法研究，并通过流片测试结果验证理论分析及仿真模型的正确性。本项目的研究对高精度导航级MEMS陀螺的研制提供一种创新思路和技术保障，具有重要科学意义。

Silicon micro-hemispherical gyroscope is limited by the existing micro-and nano-processing, because it is still difficulty to fabricate the ideal micro-hemispherical shell. The innovative self-calibrating circuit technology is an effective way to solve this problem. Therefore, this project proposed a research of self-clocking and self-calibrating electromechanical Sigma-Delta closed-loop interface circuit and its single-chip integrated technology. Firstly, the non-ideal electronic physical model of micro-hemispherical gyroscope is established based on hemispherical shell structure, size and micromachining process. And then, the multi-objective collaborative optimization of noise and nonlinearity Sigma-Delta gyroscope system model is developed based on asymmetrical errors, parasitic coupling effects, quantization noise and electronic noise. Silicon micro-hemispherical gyroscope is limited by the existing micro-and nano-processing, because it is still difficulty to fabricate the ideal micro-hemispherical shell. The innovative self-calibrating circuit technology is an effective way to solve this problem. Therefore, this project proposed a research of self-clocking and self-calibrating electromechanical Sigma-Delta closed-loop interface circuit and its single-chip integrated technology. Firstly, the non-ideal electronic physical model of micro-hemispherical gyroscope is established based on hemispherical shell structure, size and micromachining process. And then, the multi-objective collaborative optimization of noise and nonlinearity Sigma-Delta gyroscope system model is developed based on asymmetrical errors, parasitic coupling effects, quantization noise and electronic noise. Secondly, micro-hemispherical gyroscope closed-loop instability, signal harmonic distortion, noise leakage problem and frequency aliasing are considered, and the key scientific problems are solved, such as drive mode frequency self-clocking and self-calibration Sigma-Delta closed-loop interface. Finally, the simulation and optimization of Sigma-Delta micro-shell gyroscope system is developed based on the same electronic design platform; the CMOS single chip integration technology is researched based on the digital-analog hybrid cooperative design theory and Sigma-Delta digital code verification methods. The above theory analysis and the simulation models are all verified by testing results of the fabricated CMOS single chip. This project has important theoretical and practical significance for developing high precision navigation MEMS gyroscope and also providing a innovative method and technology foundation.