非侵入式无线无源MEMS眼压传感器研究

准确、连续监测眼压对青光眼诊断和治疗具有非常重要的意义。临床用常规眼压计仅能测量单次眼压，MEMS技术使眼压连续监测成为可能。已报道的眼压微传感器或需手术植入，或结构复杂，灵敏度低，尚不能满足临床需求。本项目提出一种基于LC振荡回路和互感检测原理的新型非侵入式无线无源眼压微传感器，重点研究：眼压与传感器敏感单元的力学耦合模型和增敏机理；基于LC振荡回路和互感检测的眼压传感器理论分析与设计计算；基于生物兼容性的柔性衬底敏感单元的MEMS加工方法和眼压传感器环境适应性；眼压传感器无线无源信息获取方法和眼压信号提取算法；眼外控制器检测电路和便携式眼压测量仪；非侵入式无线无源眼压传感器动物试验等。 本项目所研究的非侵入式无线无源眼压微传感器结构简单，无需额外集成信号处理和电源模块，可实现眼压连续监测，具有灵敏度高、制造简单、成本低等优点，为眼科学基础研究和青光眼的诊断治疗提供新的检测方法和技术手段

Continuous monitoring of the intraocular pressure (IOP) is upmost important for glaucoma diagnosis and treatment, which cannot be realized by conventional IOP sensors due to their bulky designs. With the development of MEMS (Micro-Electro-Mechanical Systems) technologies, miniaturized IOP sensors have demonstrated the possibilities of continuous monitoring of IOP. However, the reported micro-machined IOP sensors suffer from the problems of the requirement of implantation or complicated structures with limited resolutions, rendering their use in glaucoma diagnosis ineffective. To address these issues, in this study, a non-invasive high-sensitivity IOP micro sensor based on a simple structure design of an LC tank is proposed. Since mutual inductance is the detection mechanism used in this sensor, this IOP sensor is wireless and power free, further simplifying the device design. Key research components of this study include 1) modeling of the relationship between IOP and the sensor detecting unit with the purpose of resolution enhancement; 2) theoretical analysis and calculation of the IOP sensor performance based on the LC tank and the mutual inductance detection mechanism; 3) development of microfabrication procedures compatible with flexible substrates ensuring device biocompatibility; 4) development of environmental adaptability for the IOP micro sensor; 5) development of information acquisition algorithms and peripheral detection circuits for the wireless and power-free IOP sensor and 6) calibration and validation of the IOP sensor based on animal testing. The proposed continuous IOP monitoring sensor has the advantages of non-invasiveness without the requirement of implantation, simple device structure without the requirement of extra integrated circuits for signal processing as well as high sensitivity and low cost. In the long term, this detection methodology may push forward the development of the ophthalmology research as well as the diagnosis and treatment of glaucoma.