Design and Fabrication of a MEMS Flow Sensor and Its Application in Precise Liquid Dispensing.
Design and Fabrication of a MEMS Flow Sensor and Its Application in Precise Liquid Dispensing.
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DOI：
10.3390/s90604138
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发表时间：
2009
期刊：
影响因子：
--
通讯作者：
Sun L
中科院分区：
文献类型：
--
作者：
Liu Y;Chen L;Sun L
为提高液体点胶系统的可靠性和准确性，提出了一种高速MEMS流量传感器。得益于传感器信息反馈，该系统可以自我调整电磁阀的打开时间，以准确地分配所需体积的试剂，而无需任何预校准。首先，提出了一种基于流道压差测量的集成式高速液体流量传感器。微流通道和两个压力传感器的尺寸经过了适当的设计，以满足液体分配系统的静态和动态要求。实验结果表明，全标度流量测量范围可达80μL/S，其非线性优于0.51%FS。其次，提出了一种新的闭环控制策略来计算每个点胶周期的阀门开启时间，使系统不受液体粘度、压力波动等误差的影响。点胶结果表明，该系统能获得较好的点胶性能，在1μL下液体点胶的变异系数(CV)小于3%，100nL时的变异系数(CV)小于4%。
A high speed MEMS flow sensor to enhance the reliability and accuracy of a liquid dispensing system is proposed. Benefitting from the sensor information feedback, the system can self-adjust the open time of the solenoid valve to accurately dispense desired volumes of reagent without any pre-calibration. First, an integrated high-speed liquid flow sensor based on the measurement of the pressure difference across a flow channel is presented. Dimensions of the micro-flow channel and two pressure sensors have been appropriately designed to meet the static and dynamic requirements of the liquid dispensing system. Experiments results show that the full scale (FS) flow measurement ranges up to 80 μL/s, with a nonlinearity better than 0.51% FS. Secondly, a novel closed-loop control strategy is proposed to calculate the valve open time in each dispensing cycle, which makes the system immune to liquid viscosity, pressure fluctuation, and other sources of error. Finally, dispensing results show that the system can achieve better dispensing performance, and the coefficient of variance (CV) for liquid dispensing is below 3% at 1 μL and below 4% at 100 nL.
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期刊：
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影响因子：
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