Improvements to a Plasma Teaching Laboratory

为改善现有的教学等离子体动力学实验室的设备提供了资金。第一个目标是获得必要的设备，以引入当前对等离子体科学感兴趣和相关的几个新实验。第二个目标是使现有的实验现代化。第一个目标将通过获得用于新实验的设备来实现，这些实验将展示新的等离子体诊断或传统等离子体的现代用途。获得的射频发生器将用于半导体和其他材料的新等离子体处理实验。一个重要的激光诱导荧光诊断提供了等离子体化学信息将实现通过获取染料激光。第二个目标将通过使现有实验现代化来实现。使用带有模数转接板的个人计算机（PC）对实验数据进行数字采集和存储。这台PC机将与其他几台新的数字数据采集设备一起使用：用于发射光谱的带有电动光栅的光谱仪，用于数字朗缪尔探针测量的扫描电压电源和用于腔扰动（电子密度）测量的微波扫描发生器。涡轮分子泵将提供现代真空技术的经验。

Funds are provided for equipment to improve an existing instructional plasma dynamics laboratory. The first objective is to obtain the necessary equipment to introduce several new experiments which are of current interest and relevance to plasma science. The second objective is to modernize existing experiments. The first objective will be met by obtaining equipment to be used in new experiments which will demonstrate either new plasma diagnostics or modern uses for traditional plasmas. Acquisition of a radio frequency generator will be used in new plasma processing experiments on semiconductors and other materials. An important laser-induced fluorescence diagnostic which gives information about plasma chemistry will be implemented by acquiring a dye laser. The second objective will be met by modernizing the existing experiments. A personal computer (PC) with an analog to digital plug-in board will be used to digitally acquire and store data from experiments. This PC will be used in conjunction with several other new pieces of digital data acquisition equipment: a spectrograph with a motorized grating for emission spectroscopy, a sweep voltage supply for digital Langmuir probe measurements and a microwave sweep generator for cavity perturbation (electron density) measurements. A turbo-molecular pump will provide experience with modern vacuum technology.