IC-Processed Diaphragm Transducers

这项研究旨在开发一种用于IC处理的压电式膜片换能器的技术；特别是麦克风、扬声器和红外传感器。将对麦克风进行表征和建模，并寻求最佳性能。麦克风的各种设计和结构将被制造和表征。将开发用于分析、模拟和优化压电振膜的CAD工具，以辅助设计过程，并支持建立在具有复合层的振膜、桥梁或悬臂上的通用微机电结构。建议的红外传感器将利用氧化锌的热释电效应，它位于一个非常薄和很大的膜片上(几微米厚，几毫米见方)。

This research seeks to develop a technology for IC- processed, piezoelectric, diaphragm transducers; particularly a microphone, a speaker, and an IR sensor. Characterization and modelling of the microphone will be performed, and optimum performance will be sought. Various designs and structures of the microphone will be fabricated and characterized. CAD tools for analysis, simulation, and optimization of the piezoelectric diaphragm will be developed to aid the design process, and to support generic microelectromechanical structures built on a diaphragm, a bridge or a cantilever with composite layers. The proposed IR sensor will use the pyroelectric effect of ZnO that is sitting on a very thin and large diaphragm (a few microns thick and a few millimeters square).